Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner
Ozaki, Takashi, Ohta, Norikazu, Fujiyoshi, Motohiro
Published in Sensors (Basel, Switzerland) (01.06.2022)
Published in Sensors (Basel, Switzerland) (01.06.2022)
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Journal Article
Analytical modeling of a MEMS beam resonator with release-etch holes
Ozaki, Takashi, Ohta, Norikazu, Fujiyoshi, Motohiro
Published in Journal of micromechanics and microengineering (01.09.2022)
Published in Journal of micromechanics and microengineering (01.09.2022)
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Journal Article
Improved anchor design for flat MEMS structure by suppressing deformation due to buried-oxide stress on silicon-on-insulator wafer
Fujiyoshi, Motohiro, Ozaki, Takashi, Omura, Yoshiteru, Funabashi, Hirofumi, Akashi, Teruhisa, Nonomura, Yutaka
Published in Journal of micromechanics and microengineering (01.04.2021)
Published in Journal of micromechanics and microengineering (01.04.2021)
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Journal Article
Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias
Hata, Yoshiyuki, Suzuki, Yukio, Muroyama, Masanori, Nakayama, Takahiro, Nonomura, Yutaka, Chand, Rakesh, Hirano, Hideki, Omura, Yoshiteru, Fujiyoshi, Motohiro, Tanaka, Shuji
Published in Sensors and actuators. A. Physical. (15.04.2018)
Published in Sensors and actuators. A. Physical. (15.04.2018)
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