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ASZODI, GABOR, ERDELYI, KATALIN, FUELE, GYOERGY, SOMOGYI, MARIA, FERENCZI, GYOERGY
Year of Publication 17.11.1988
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Year of Publication 17.11.1988
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Method and apparatus for determining the layer thickness of semiconductor layer structures
ASZODI; GABOR, SOMOGYI; MARIA, FERENCZI; GYOERGY, FUELE; GYOERGY, BODA; JANOS, ERDELYI; KATALIN
Year of Publication 26.02.1991
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Year of Publication 26.02.1991
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VERFAHREN UND ANLAGE ZUR SCHICHTDICKEBESTIMMUNG BEI HALBLEITER-SCHICHTKONSTRUKTIONEN
ERDELYI,KATALIN,HU, ASZODI,GABOR,HU, SOMOGYI,MARIA,HU, FERENCZI,GYOERGY,HU, FUELE,GYOERGY,HU, BODA,JANOS,HU
Year of Publication 18.10.1989
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Year of Publication 18.10.1989
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