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Year of Publication 26.01.2021
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Year of Publication 26.08.2015
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Year of Publication 24.04.2019
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Year of Publication 14.02.2023
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Year of Publication 24.05.2024
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Year of Publication 24.05.2024
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Year of Publication 23.02.2023
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Substrate holder, a lithographic apparatus and method of manufacturing devices
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Year of Publication 19.01.2021
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Year of Publication 26.12.2018
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