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"FRANK MELZER"
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"FRANK MELZER"
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Method of connecting a multiplicity of optical elements to a basic body
by
MELZER FRANK
,
BINGEL ULRICH
Year of Publication
25.04.2006
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Method of connecting a multiplicity of optical elements to a basic body
by
Melzer
,
Frank
,
Bingel, Ulrich
Year of Publication
25.04.2006
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Lighting system, particularly for use in extreme ultraviolet (euv) lithography
by
MELZER FRANK
,
SINGER WOLFGANG
Year of Publication
11.08.2005
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Lighting system, particularly for use in extreme ultraviolet (EUV) lithography
by
MELZER FRANK
,
SINGER WOLFGANG
Year of Publication
03.08.2005
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Device for precise alignment of an optical component
by
BAYER, MARTIN
,
MELZER
,
FRANK
Year of Publication
08.06.2005
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OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
by
FIOLKA DAMIAN
,
MELZER FRANK
,
XALTER STEFAN
,
KWAN YIM-BUN PATRICK
Year of Publication
27.12.2012
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Optical system for semiconductor lithography
by
FIOLKA DAMIAN
,
MELZER FRANK
,
XALTER STEFAN
,
KWAN YIM-BUN PATRICK
Year of Publication
18.09.2012
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Optical system for semiconductor lithography
by
Melzer
,
Frank
,
Kwan, Yim-Bun Patrick
,
Xalter, Stefan
,
Fiolka, Damian
Year of Publication
18.09.2012
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Method for bonding a plurality of optical elements to a base
by
MELZER
,
FRANK
,
BINGEL, ULRICH
Year of Publication
10.03.2004
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Device for precise alignment of an optical component
by
BAYER, MARTIN
,
MELZER
,
FRANK
Year of Publication
17.12.2003
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Lighting system, particularly for use in extreme ultraviolet (euv) lithography
by
WOLFGANG SINGER
,
FRANK MELZER
Year of Publication
17.11.2003
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LIGHTING SYSTEM, PARTICULARLY FOR USE IN EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY
by
WOLFGANG SINGER
,
FRANK MELZER
Year of Publication
17.11.2003
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Precision positioning apparatus for positioning a component especially an optical component
by
BAYER MARTIN
,
MELZER FRANK
Year of Publication
05.08.2003
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Precision positioning apparatus for positioning a component especially an optical component
by
Melzer
,
Frank
,
Bayer, Martin
Year of Publication
05.08.2003
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PRECISION POSITION SETTING DEVICE TO SET POSITION OF COMPONENT, PARTICULARLY OPTICAL COMPONENT
by
BAYER MARTIN
,
MELZER FRANK
Year of Publication
05.04.2002
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METHOD FOR CONNECTING PLURALITY OF OPTICAL ELEMENT TO SUBSTRATE
by
MELZER FRANK
,
BINGEL ULRICH
Year of Publication
12.03.2002
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Precision positioning apparatus for positioning a component especially an optical component
by
BAYER MARTIN
,
MELZER FRANK
Year of Publication
21.02.2002
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Method of connecting a multiplicity of optical elements to a basic body
by
Melzer
,
Frank
,
Bingel, Ulrich
Year of Publication
21.02.2002
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Patent
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Precision positioning apparatus for positioning a component especially an optical component
by
Melzer
,
Frank
,
Bayer, Martin
Year of Publication
21.02.2002
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Patent
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Method of connecting a multiplicity of optical elements to a basic body
by
MELZER FRANK
,
BINGEL ULRICH
Year of Publication
21.02.2002
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Patent
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