Hydrogenation and surface density changes in hydrocarbon films during erosion using Ar/H2 plasmas
Fox-Lyon, N., Oehrlein, G. S., Ning, N., Graves, D. B.
Published in Journal of applied physics (15.11.2011)
Published in Journal of applied physics (15.11.2011)
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Journal Article
Hydrogenation and surface density changes in hydrocarbon films during erosion using Ar/H 2 plasmas
Fox-Lyon, N., Oehrlein, G. S., Ning, N., Graves, D. B.
Published in Journal of applied physics (30.11.2011)
Published in Journal of applied physics (30.11.2011)
Get full text
Journal Article
Hydrogenation and surface density changes in hydrocarbon films during erosion using Ar/H{sub 2} plasmas
Fox-Lyon, N., Oehrlein, G. S., Ning, N., Graves, D. B.
Published in Journal of applied physics (15.11.2011)
Published in Journal of applied physics (15.11.2011)
Get full text
Journal Article
Atmospheric-pressure air plasma jet and its application to photoresist material etching
Lijun Wang, Fox-Lyon, N., Weilnboeck, F., Shenli Jia, Oehrlein, G.
Published in 2011 Abstracts IEEE International Conference on Plasma Science (01.06.2011)
Published in 2011 Abstracts IEEE International Conference on Plasma Science (01.06.2011)
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