An improved gallium liquid metal ion source geometry for nanotechnology
VAN ES, J. J, GIERAK, J, FORTIES, R. G, SUVOROV, V. G, VAN DEN BERGHE, T, DUBUISSON, Ph, MONNET, I, SEPTIER, A
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
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