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Year of Publication 24.06.2024
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SHAPED ELECTRODES FOR IMPROVED PLASMA EXPOSURE FROM VERTICAL PLASMA SOURCE
DZILNO DMITRY A, SUBRAMANI ANANTHA K, TANAKA TSUTOMU, BERA KALLOL, FORSTER JOHN C
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Year of Publication 30.08.2022
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CCP 플라즈마 또는 RPS 세정을 이용한 SiN의 세정
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Year of Publication 30.01.2024
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Year of Publication 30.01.2024
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HOLE PATTERN FOR UNIFORM ILLUMINATION OF WORKPIECE BELOW A CAPACITIVELY COUPLED PLASMA SOURCE
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Year of Publication 04.04.2022
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Year of Publication 04.04.2022
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기판을 프로세싱하기 위한 방법들 및 장치
SHI TIEFENG, WHIG RENU, LEI JIANXIN, NAYAK AVINASH, ZHOU LEI, FU GANG, WYSOK IRENA H, CHONG HALBERT, REDDY SUNDARAPANDIAN RAMALINGA VIJAYALAKSHMI, WANG ZHIYONG, WANG RONGJUN, MILLER KEITH A, GUNG TZA JING, FORSTER JOHN C, SAVANDAIAH KIRANKUMAR NEELASANDRA
Year of Publication 07.05.2024
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Year of Publication 07.05.2024
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PE-ALD MICROWAVE PLASMA SOURCE FOR SPATIAL PLASMA ENHANCED ATOMIC LAYER DEPOSITION PE-ALD PROCESSING TOOL
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Year of Publication 09.02.2023
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Year of Publication 09.02.2023
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향상된 선택성 및 유동 컨덕턴스를 갖는 금속 산화물 사전세정 챔버
TANG XIANMIN, LEI YU, SAINATH ABILASH, VISHWANATH YOGANANDA SARODE, CHANG XUE YANG, GUNG TZA JING, NGUYEN ANDREW, FORSTER JOHN C
Year of Publication 05.01.2023
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Year of Publication 05.01.2023
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PLASMA SOURCE FOR ROTATING SUSCEPTOR
SUBRAMANI ANANTHA K, KRAUS PHILIP A, HOUSHMAND FARZAD, BERA KALLOL, FORSTER JOHN C, CHEN HANHONG
Year of Publication 12.03.2021
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Year of Publication 12.03.2021
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Transport of dust particles in glow-discharge plasmas
Barnes, MS, Keller, JH, Forster, JC, O'Neill, JA, Coultas, DK
Published in Physical review letters (20.01.1992)
Published in Physical review letters (20.01.1992)
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Journal Article
수직 플라즈마 소스로부터의 개선된 플라즈마 노출을 위한 성형된 전극들
DZILNO DMITRY A, SUBRAMANI ANANTHA K, TANAKA TSUTOMU, BERA KALLOL, FORSTER JOHN C
Year of Publication 22.07.2020
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Year of Publication 22.07.2020
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서셉터를 회전시키기 위한 플라즈마 소스
SUBRAMANI ANANTHA K, KRAUS PHILIP A, HOUSHMAND FARZAD, BERA KALLOL, FORSTER JOHN C, CHEN HANHONG
Year of Publication 04.11.2019
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Year of Publication 04.11.2019
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공간적 플라즈마 강화 원자층 증착(PE-ALD) 프로세싱 툴을 위한 마이크로파 플라즈마 소스
DZILNO DMITRY A, SUBRAMANI ANANTHA K, GARACHTCHENKO ALEXANDER V, LI XIAOPU, TANAKA TSUTOMU, SHERVEGAR AVINASH, BERA KALLOL, FORSTER JOHN C, KUDELA JOZEF
Year of Publication 12.10.2020
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Year of Publication 12.10.2020
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저주파수 바이어스를 활용한 유전체 막들의 기하학적 선택적 증착
DZILNO DMITRY A, TANAKA KEIICHI, SILVETTI MARIO D, OHNO KENICHI, GARACHTCHENKO ALEXANDER V, XIA LI QUN, MURTAGH MIKE, TANAKA TSUTOMU, FORSTER JOHN C, RAMADAS RAKESH
Year of Publication 24.07.2020
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Year of Publication 24.07.2020
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SYMMETRIC PLASMA SOURCE TO GENERATE PIE SHAPED TREATMENT
SUBRAMANI ANANTHA K, CHOWDHURY ABHISHEK, KRAUS PHILIP A, HOUSHMAND FARZAD, FORSTER JOHN C, BERA KALLOL
Year of Publication 26.09.2017
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Year of Publication 26.09.2017
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RF ELECTROSTATIC CHUCK FOR HIGH TEMPERATURE RF APPLICATIONS
MILLER KEITH A, PARKHE VIJAY D, FORSTER JOHN C, HANSON RYAN, KOPPA MANJUNATHA
Year of Publication 16.08.2017
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Year of Publication 16.08.2017
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SYMMETRIC PLASMA SOURCE TO GENERATE PIE SHAPED TREATMENT
SUBRAMANI ANANTHA K, CHOWDHURY ABHISHEK, KRAUS PHILIP A, HOUSHMAND FARZAD, FORSTER JOHN C, BERA KALLOL
Year of Publication 02.08.2017
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Year of Publication 02.08.2017
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슬롯이 있는 접지 플레이트를 갖춘 플라즈마 모듈
SAKAMOTO NOBUHIRO, YANAGAWA TAKUMI, SRIRAM MANDYAM, KHANDELWAL SOMESH, TANAKA KEIICHI, YUDOVSKY JOSEPH, TAKESHITA KENJI, FORSTER JOHN C, BERA KALLOL
Year of Publication 20.04.2018
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Year of Publication 20.04.2018
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LATERAL PLASMA/RADICAL SOURCE
ANANTHA K SUBRAMANI, KALLOL BERA, PHILIP A KRAUS, NATTAWORN NUNTAWORANUCH, KAUSHAL GANGAKHEDKAR, FARZAD HOUSHMAND, FORSTER JOHN C, ABHISHEK CHOWDHURY
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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LATERAL PLASMA/RADICAL SOURCE
SUBRAMANI ANANTHA K, CHOWDHURY ABHISHEK, NUNTAWORANUCH NATTAWORN, GANGAKHEDKAR KAUSHAL, KRAUS PHILIP A, HOUSHMAND FARZAD, FORSTER JOHN C, BERA KALLOL
Year of Publication 20.09.2017
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Year of Publication 20.09.2017
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