Replacement Metal Gate Process Extendible Beyond 2-nm Node with Superior Gate Conductivity
Yoshida, Naomi, Fisher, Ilanit, Ren, He, Lin, Chi-Chou, Shen, Chenfei, Lin, Yongjing, Xu, Yi, Chen, Michael S-.C., Naik, Mehul
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
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Conference Proceeding
DEPOSITION OF PURE METAL FILMS
BUTAIL GORUN, THOMBARE SHRUTI VIVEK, VAN CLEEMPUT PATRICK A, FISHER ILANIT
Year of Publication 22.09.2022
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Year of Publication 22.09.2022
Patent
유전체 선택성 개선을 위한 무불소 텅스텐 ALD
SHEN CHENFEI, YOSHIDA NAOMI, LIN CHI CHOU, WU KEDI, SRIRAM MANDYAM, CHEN SHIH CHUNG, GANDIKOTA SRINIVAS, REN HE, FISHER ILANIT, CHEN WEN TING
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
Patent
합금 원자 층 증착에서 전구체들의 균질 혼합을 위한 시스템들 및 방법들
VAN CLEEMPUT PATRICK, THOMBARE SHRUTI, HUMAYUN RAASHINA, DANEK MICHAL, FISHER ILANIT
Year of Publication 30.07.2020
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Year of Publication 30.07.2020
Patent
Explosive Detection by Microthermal Analysis
Zuck, Asaf, Greenblatt, Jeremy, Zifman, Adi, Zaltsman, Amalia, Kendler, Shay, Frishman, Gad, Meltzer, Sheffer, Fisher, Ilanit
Published in Journal of energetic materials (01.07.2008)
Published in Journal of energetic materials (01.07.2008)
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Journal Article
SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALLOY ATOMIC LAYER DEPOSITION
Van Cleemput, Patrick, Danek, Michal, Thombare, Shruti, Humayun, Raashina, FISHER, Ilanit
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
Patent
Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition
Van Cleemput, Patrick, Danek, Michal, Thombare, Shruti, Humayun, Raashina, Fisher, Ilanit
Year of Publication 28.11.2023
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Year of Publication 28.11.2023
Patent
DEPOSITION OF PURE METAL FILMS
BUTAIL, Gorun, THOMBARE, Shruti Vivek, VAN CLEEMPUT, Patrick A, FISHER, Ilanit
Year of Publication 08.12.2022
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Year of Publication 08.12.2022
Patent
Fluorine-free tungsten ALD for dielectric selectivity improvement
Chen, Wen Ting, Sriram, Mandyam, Ren, He, Lin, Chi-Chou, Fisher, Ilanit, Yoshida, Naomi, Chen, Shih Chung, Wu, Kedi, Gandikota, Srinivas, Shen, Chenfei
Year of Publication 13.08.2024
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Year of Publication 13.08.2024
Patent
Method Of Reducing Titanium Nitride Etching During Tungsten Film Formation
Sriram, Mandyam, Lin, Chi-Chou, Fisher, Ilanit, Chen, Shih Chung, Wu, Kedi, Shen, Chenfei, Gandikota, Srinivas
Year of Publication 31.03.2022
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Year of Publication 31.03.2022
Patent
DEPOSITION OF PURE METAL FILMS
Butail, Gorun, van Cleemput, Patrick A, Fisher, Ilanit, Thombare, Shruti Vivek
Year of Publication 13.05.2021
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Year of Publication 13.05.2021
Patent
METHOD OF REDUCING TITANIUM NITRIDE ETCHING DURING TUNGSTEN FILM FORMATION
SRIRAM, Mandyam, CHEN, Shih Chung, SHEN, Chenfei, LIN, Chi-Chou, WU, Kedi, FISHER, Ilanit, GANDIKOTA, Srinivas
Year of Publication 07.04.2022
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Year of Publication 07.04.2022
Patent
SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALLOY ATOMIC LAYER DEPOSITION
VAN CLEEMPUT, Patrick, THOMBARE, Shruti, DANEK, Michal, HUMAYUN, Raashina, FISHER, Ilanit
Year of Publication 31.12.2020
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Year of Publication 31.12.2020
Patent
FLUORINE-FREE TUNGSTEN ALD FOR DIELECTRIC SELECTIVITY IMPROVEMENT
Chen, Wen Ting, Sriram, Mandyam, Ren, He, Lin, Chi-Chou, Fisher, Ilanit, Yoshida, Naomi, Chen, Shih Chung, Wu, Kedi, Gandikota, Srinivas, Shen, Chenfei
Year of Publication 09.12.2021
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Year of Publication 09.12.2021
Patent
FLUORINE-FREE TUNGSTEN ALD FOR DIELECTRIC SELECTIVITY IMPROVEMENT
SRIRAM, Mandyam, CHEN, Shih Chung, SHEN, Chenfei, REN, He, YOSHIDA, Naomi, LIN, Chi-Chou, CHEN, Wen Ting, FISHER, Ilanit, WU, Kedi, GANDIKOTA, Srinivas
Year of Publication 09.12.2021
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Year of Publication 09.12.2021
Patent
DEPOSITION OF PURE METAL FILMS
BUTAIL, Gorun, THOMBARE, Shruti Vivek, VAN CLEEMPUT, Patrick A, FISHER, Ilanit
Year of Publication 30.01.2020
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Year of Publication 30.01.2020
Patent
SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALLOY ATOMIC LAYER DEPOSITION
VAN CLEEMPUT, Patrick, THOMBARE, Shruti, DANEK, Michal, HUMAYUN, Raashina, FISHER, Ilanit
Year of Publication 27.06.2019
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Year of Publication 27.06.2019
Patent
Fluorine-Free Tungsten ALD And Tungsten Selective CVD For Dielectrics
Lin, Chi-Chou, Fisher, Ilanit, Yoshida, Naomi, Gandikota, Srinivas, Chen, Wen Ting, Lin, Ashley, Xu, Yi, Sriram, Mandyam, Ren, He, Chen, Shih Chung, Wu, Kedi, Lei, Yu, Shen, Chenfei
Year of Publication 09.12.2021
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Year of Publication 09.12.2021
Patent
DEPOSITION OF PURE METAL FILMS
BUTAIL GORUN, THOMBARE SHRUTI VIVEK, VAN CLEEMPUT PATRICK A, FISHER ILANIT
Year of Publication 16.03.2021
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Year of Publication 16.03.2021
Patent
Method of reducing titanium nitride etching during tungsten film formation
CHEN, SHIHUNG, SHEN, CHEN-FEI, FISHER, ILANIT, WU, KE-DI, SRIRAM, MANDYAM, GANDIKOTA, SRINIVAS, LIN, CHIOU
Year of Publication 16.08.2022
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Year of Publication 16.08.2022
Patent