by YAMAZAKI, Z., TAKAHAMA, T., FIJIMORI, Y., OHNISHI, K., HIRAISHI, M., KANAI, F., IDEZUKI, Y., INOUE, N., TSUDA, N., YAMAWAKI, N., INAGAKI, K.
Published in Jinko Zoki (1987)

by Sasaski, T., Hisano, K., Sakamoto, T., Monma, S., Fijimori, Y., Iwasaki, H., Ishizuka, M.
Published in Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium (1995)