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Year of Publication 08.07.2009
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Antireflective composition for a deep ultraviolet photoresist
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Year of Publication 01.11.2004
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Year of Publication 01.11.2004
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
STANLEY A, FICNER, RALPH R. DAMMEL, JOSEPH E. OBERLANDER, MUNIRATHNA PADMANABAN, JOHN P. SAGAN
Year of Publication 30.04.2004
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Year of Publication 30.04.2004
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
FICNER, STANLEY, A, OBERLANDER, JOSEPH, E, DAMMEL, RALPH, R, SAGAN, JOHN, P, PADMANABAN, MUNIRATHNA
Year of Publication 12.09.2001
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Year of Publication 12.09.2001
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METHOD OF DEVELOPING POSITIVE PHOTORESIST AND DEVELOPING COMPOSITIONS THEREFOR
MAGVAS, JOHN, FICNER, STANLEY, A, MOREAU, WAYNE, M, LYONS, CHRISTOPHER, F, PLAT, MARINA, V
Year of Publication 02.05.2001
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Year of Publication 02.05.2001
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
FICNER, STANLEY, A, OBERLANDER, JOSEPH, E, DAMMEL, RALPH, R, SAGAN, JOHN, P, PADMANABAN, MUNIRATHNA
Year of Publication 05.10.2000
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Year of Publication 05.10.2000
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Antireflective composition for a deep ultraviolet photoresist
DAMMEL; RALPH R, PADMANABAN; MUNIRATHNA, OBERLANDER; JOSEPH E, SAGAN; JOHN P, FICNER; STANLEY A
Year of Publication 05.09.2000
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Year of Publication 05.09.2000
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
FICNER, STANLEY, A, OBERLANDER, JOSEPH, E, DAMMEL, RALPH, R, SAGAN, JOHN, P, PADMANABAN, MUNIRATHNA
Year of Publication 25.05.2000
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Year of Publication 25.05.2000
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Method of developing positive photoresist and compositions therefor
PLAT; MARINA V, LYONS; CHRISTOPHER F, FICNER; STANLEY A, MAGVAS; JOHN, MOREAU; WAYNE M
Year of Publication 13.10.1998
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Year of Publication 13.10.1998
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METHOD OF DEVELOPING POSITIVE PHOTORESIST AND COMPOSITIONS THEREFOR
MAGVAS, JOHN, FICNER, STANLEY, A, MOREAU, WAYNE, M, LYONS, CHRISTOPHER, F, PLAT, MARINA, V
Year of Publication 05.11.1997
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Year of Publication 05.11.1997
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