PECVD COATING USING AN ORGANOSILICON PRECURSOR PECVD
SAGONA, PETER J. PJ, FELTS, JOHN T. JT, ABRAMS, ROBERT S. RS, PANGBORN, ROBERT J. RJ, FISK, THOMAS, E. TE
Year of Publication 08.02.2013
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Year of Publication 08.02.2013
Patent