Search Results - "FELIX LEIB KOZAKEVICH" :: K.UTB vyhledávací portál

THREE OR MORE STATES FOR ACHIEVING HIGH ASPECT RATIO DIELECTRIC ETCH

by YANAGAWA TAKUMI, BRADFORD J LYNDAKER, ALEXEI MARAKHTANOV, FELIX LEIB KOZAKEVICH, NIKHIL DOLE, RANADEEP BHOWMICK, HUDSON ERIC, JOHN HOLLAND
Year of Publication 21.05.2024

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RF MAGNETIC FIELD SENSOR FOR HARMONIC MEASUREMENTS AND UNIFORMITY CONTROL

by Kozakevich, Felix Leib
Year of Publication 08.06.2023

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Systems and Methods for Use of Low Frequency Harmonics in Bias Radiofrequency Supply to Control Uniformity of Plasma Process Results Across Substrate

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Holland, John, Marakhtanov, Alexei
Year of Publication 05.10.2023

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Systems and Methods for Extracting Process Control Information from Radiofrequency Supply System of Plasma Processing System

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Holland, John, Marakhtanov, Alexei
Year of Publication 21.09.2023

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Systems and Methods for Radiofrequency Signal Generator-Based Control of Impedance Matching System

by Hopkins, David, Lyndaker, Bradford J, Kozakevich, Felix Leib, Marakhtanov, Alexei
Year of Publication 10.08.2023

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Impedance match with an elongated RF strap

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 03.09.2024

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SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 06.06.2024

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Systems and methods for cleaning an edge ring pocket

by Lucchesi, Kenneth, Briggs, Scott, Kozakevich, Felix Leib, Holland, John, Hudson, Eric, Marakhtanov, Alexei
Year of Publication 19.03.2024

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Systems and methods for optimizing power delivery to an electrode of a plasma chamber

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 20.02.2024

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SYSTEMS AND METHODS FOR RADIOFREQUENCY SIGNAL GENERATOR-BASED CONTROL OF IMPEDANCE MATCHING SYSTEM

by KOZAKEVICH, Felix Leib, LYNDAKER, Bradford J, MARAKHTANOV, Alexei, HOPKINS, David
Year of Publication 19.05.2022

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LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK

by Bhowmick, Ranadeep, Holland, John Patrick, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing, Matyushkin, Alexander
Year of Publication 31.08.2023

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UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH

by Holland, John P, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing
Year of Publication 10.08.2023

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SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC

by Bhowmick, Ranadeep, Caron, James Eugene, Holland, John Patrick, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing
Year of Publication 03.08.2023

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DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY

by Bhowmick, Ranadeep, Holland, John P, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing
Year of Publication 06.07.2023

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IMPEDANCE MATCH WITH AN ELONGATED RF STRAP

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 16.03.2023

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ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING

by MACE, Adam Christopher, COMENDANT, Keith, KOZAKEVICH, Felix Leib, HOLLAND, John, MARAKHTANOV, Alexei, EHRLICH, Darrell, MATYUSHKIN, Alexander
Year of Publication 09.03.2023

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