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Year of Publication 08.08.2019
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Year of Publication 20.06.2019
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Year of Publication 28.05.2019
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Year of Publication 28.05.2019
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Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
Kozakevich, Felix, Lucchesi, Kenneth, Zhao, Lin, Holland, John Patrick, Chen, Zhigang, Marakhtanov, Alexei, Kellogg, Michael C
Year of Publication 07.05.2019
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Year of Publication 07.05.2019
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Multi Regime Plasma Wafer Processing to Increase Directionality of Ions
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Year of Publication 14.03.2019
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UNIFORMITY CONTROL CIRCUIT FOR USE WITHIN AN IMPEDANCE MATCHING CIRCUIT
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Year of Publication 13.04.2017
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High Speed Synchronization Of Plasma Source/Bias Power Delivery
BURRY, Aaron M, KOZAKEVICH, Felix Leib, GITLIN, Benjamin J, FISK, II, Larry J, HOLLAND, John, OLDZIEJ, Mariusz, JI, Bing, BHOWMICK, Ranadeep, SMYKA, Jonathan W, MARAKHTANOV, Alexei, RADOMSKI, Aaron T
Year of Publication 06.01.2022
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Year of Publication 06.01.2022
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HIGH SPEED SYNCHRONIZATION OF PLASMA SOURCE/BIAS POWER DELIVERY
BURRY, Aaron M, KOZAKEVICH, Felix Leib, GITLIN, Benjamin J, HOLLAND, John, OLDZIEJ, Mariusz, JI, Bing, BHOWMICK, Ranadeep, SMYKA, Jonathan W, MARAKHTANOV, Alexei, RADOMSKI, Aaron T, FISK, Larry J
Year of Publication 29.11.2021
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Year of Publication 29.11.2021
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ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
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Year of Publication 03.01.2019
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Year of Publication 03.01.2019
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High speed synchronization of plasma source/bias power delivery
Fisk, II, Larry J, Bhowmick, Ranadeep, Radomski, Aaron T, Kozakevich, Felix Leib, Gitlin, Benjamin J, Smyka, Jonathan W, Ji, Bing, Holland, John, Oldziej, Mariusz, Marakhtanov, Alexei, Burry, Aaron M
Year of Publication 26.10.2021
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Year of Publication 26.10.2021
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