Search Results - "FELIX KOZAKEVICH" :: K.UTB vyhledávací portál

SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET

by Lucchesi, Kenneth, Briggs, Scott, Kozakevich, Felix Leib, Holland, John, Hudson, Eric, Marakhtanov, Alexei
Year of Publication 11.08.2022

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DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY

by KOZAKEVICH, Felix, HOLLAND, John, JI, Bing, BHOWMICK, Ranadeep, MARAKHTANOV, Alexei
Year of Publication 11.08.2022

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SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 23.06.2022

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LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK

by KOZAKEVICH, Felix, HOLLAND, John, JI, Bing, BHOWMICK, Ranadeep, MARAKHTANOV, Alexei, MATYUSHKIN, Alexander
Year of Publication 16.06.2022

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Systems and methods for optimizing power delivery to an electrode of a plasma chamber

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 17.05.2022

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Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators

by Kozakevich, Felix, Lucchesi, Kenneth, Zhao, Lin, Holland, John Patrick, Chen, Zhigang, Marakhtanov, Alexei, Kellogg, Michael C
Year of Publication 07.12.2021

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SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER

by Bhowmick, Ranadeep, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 14.10.2021

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ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION

by Kozakevich, Felix, Holland, John Patrick, Marakhtanov, Alexei, Matyushkin, Alexander, Gaff, Keith
Year of Publication 23.09.2021

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SYSTEMS AND METHODS FOR USING BINNING TO INCREASE POWER DURING A LOW FREQUENCY CYCLE

by KOZAKEVICH, Felix Leib, HOLLAND, John, BHOWMICK, Ranadeep, JI, Bing, MARAKHTANOV, Alexei
Year of Publication 02.09.2021

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RADIOFREQUENCY SIGNAL FILTER ARRANGEMENT FOR PLASMA PROCESSING SYSTEM

by KOZAKEVICH, Felix, HOLLAND, John, JI, Bing, BHOWMICK, Ranadeep, MARAKHTANOV, Alexei
Year of Publication 12.08.2021

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ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING

by MACE, Adam Christopher, COMENDANT, Keith, KOZAKEVICH, Felix Leib, HOLLAND, John, MARAKHTANOV, Alexei, EHRLICH, Darrell, MATYUSHKIN, Alexander
Year of Publication 12.08.2021

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OPTIMIZATION OF RADIOFREQUENCY SIGNAL GROUND RETURN IN PLASMA PROCESSING SYSTEM

by KOZAKEVICH, Felix, HOLLAND, John, JI, Bing, BHOWMICK, Ranadeep, MARAKHTANOV, Alexei, LUCCHESI, Kenneth
Year of Publication 12.08.2021

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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

by MACE, Adam, KOZAKEVICH, Felix, HOLLAND, John, MARAKHTANOV, Alexei, KELLOGG, Michael, C, MATYUSHKIN, Alexander, CHEN, Zhigang
Year of Publication 11.08.2021

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IMPEDANCE MATCH WITH AN ELONGATED RF STRAP

by KOZAKEVICH, Felix Leib, HOLLAND, John, JI, Bing, BHOWMICK, Ranadeep, MARAKHTANOV, Alexei
Year of Publication 05.08.2021

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Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity

by Kozakevich, Felix, Holland, John Patrick, Chen, Zhigang, Singh, Harmeet, Marakhtanov, Alexei, Matyushkin, Alexander, Gaff, Keith
Year of Publication 20.07.2021

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High speed synchronization of plasma source/bias power delivery

by Fisk, II, Larry J, Bhowmick, Ranadeep, Radomski, Aaron T, Kozakevich, Felix Leib, Gitlin, Benjamin J, Smyka, Jonathan W, Ji, Bing, Holland, John, Oldziej, Mariusz, Marakhtanov, Alexei, Burry, Aaron M
Year of Publication 19.03.2024

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