A novel electrically controlled flexible liquid micro lens
Feldmann, M., Butefisch, S., Buttgenbach, S.
Published in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 (2003)
Published in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 (2003)
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Conference Proceeding
Sensor or a microphone having such a sensor
SCHREIBER PETER, GORELIK VLADIMIR, KUDAEV SERGEY, NIEHOFF WOLFGANG, MAROWSKY GERD, IHLEMANN JUERGEN, HIBBING MANFRED, BUETTGENBACH STEPHANUS, MICHAELIS ANDRE, FELDMANN MARCO, WEICHENHAIN RUTH
Year of Publication 16.12.2004
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Year of Publication 16.12.2004
Patent
Sensor or a microphone having such a sensor
Gorelik, Vladimir, Michaelis, Andre, Hibbing, Manfred, Niehoff, Wolfgang, Marowsky, Gerd, Weichenhain, Ruth, Ihlemann, Juergen, Feldmann, Marco, Buettgenbach, Stephanus, Kudaev, Sergey, Schreiber, Peter
Year of Publication 16.12.2004
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Year of Publication 16.12.2004
Patent
Sensor bzw. Mikrofon mit einem solchen Sensor
HIBBING, MANFRED, MICHAELIS, ANDRE, BUETTGENBACH, STEPHANUS, GORELIK, VLADIMIR, NIEHOFF, WOLFGANG, KUDAEV, SEGREY, MAROWSKY, GERD, FELDMANN, MARCO, WEICHENHAIN, RUTH, IHLEMANN, JUERGEN, SCHREIBER, PETER
Year of Publication 28.10.2004
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Year of Publication 28.10.2004
Patent