METODO PARA LA FABRICACION DE ESTRUCTURAS DE PUERTA DE TRANSISTORES MOSFET MEDIANTE TECNICAS DE PLASMA SIN UTILIZAR GASES CONTAMINANTES
MARTIL DE LA PLAZA, IGNACIO, FEIJOO GUERRO, PEDRO, SAN ANDRES, ENRIQUE, GONZALEZ DIAZ, GERMAN, LUCIA MULAS, MARIA LUISA, TOLEDANO LUQUE, MARIA, DEL PRADO MILLAN, ALVARO
Year of Publication 12.09.2012
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Year of Publication 12.09.2012
Patent
Method of fabrication of mosfet transistor gate structures on semiconductors iii-v (Machine-translation by Google Translate, not legally binding)
PAMPILLON ARCE, MARIA ANGELA, FEIJOO GUERRO, PEDRO, SAN ANDRES, ENRIQUE, CANADILLA SOTO, CARMINA, LUCIA MULAS, MARIA LUISA, DEL PRADO MILLAN, ALVARO
Year of Publication 23.12.2013
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Year of Publication 23.12.2013
Patent
Method for the manufacture of mosfet transistor door structures by plasma techniques without using contaminating gases. (Machine-translation by Google Translate, not legally binding)
MARTIL DE LA PLAZA, IGNACIO, FEIJOO GUERRO, PEDRO, SAN ANDRES, ENRIQUE, GONZALEZ DIAZ, GERMAN, LUCIA MULAS, MARIA LUISA, TOLEDANO LUQUE, MARIA, DEL PRADO MILLAN, ALVARO
Year of Publication 25.10.2011
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Year of Publication 25.10.2011
Patent