Misfit dislocation nucleation study in p/p+ silicon
FEICHTINGER, Petra, GOORSKY, Mark S, OSTER, Dwain, D'SILVA, Tom, MORELAND, Jim
Published in Journal of the Electrochemical Society (2001)
Published in Journal of the Electrochemical Society (2001)
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Journal Article
In-Line Process Window Monitoring using Voltage Contrast Inspection
Patterson, O.D., Kang, H.H., Wu, K., Feichtinger, P.
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
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Conference Proceeding
Novel, Sem-Based Method for Wafer Inspection Recipe Optimization
Stamper, A., Sang Chong, Nafisi, K., Feichtinger, P., Wee Teck Chia, Randall, D., Khullar, A.
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
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Conference Proceeding
X-ray topographic system
Bowen, David Keith, Wormington, Matthew, Pina, Ladislav, Feichtinger, Petra
Year of Publication 24.08.2004
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Year of Publication 24.08.2004
Patent
X-ray topographic system
FEICHTINGER PETRA, WORMINGTON MATTHEW, BOWEN DAVID KEITH, PINA LADISLAV
Year of Publication 24.08.2004
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Year of Publication 24.08.2004
Patent
X-ray topographic system
Bowen, David, Wormington, Matthew, Pina, Ladislav, Feichtinger, Petra
Year of Publication 12.06.2003
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Year of Publication 12.06.2003
Patent
X-ray topographic system
FEICHTINGER PETRA, WORMINGTON MATTHEW, BOWEN DAVID KEITH, PINA LADISLAV
Year of Publication 12.06.2003
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Year of Publication 12.06.2003
Patent
Positioning Apparatus
WORMINGTON, MATTHEW, MATNEY, KEVIN, BOWEN, DAVID KEITH, FEICHTINGER, PETRA, SPENCE, JOHN
Year of Publication 19.07.2006
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Year of Publication 19.07.2006
Patent
X-ray topographic system
WORMINGTON, MATTHEW, PINA, LADISLAV, BOWEN, DAVID KEITH, FEICHTINGER, PETRA
Year of Publication 01.08.2003
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Year of Publication 01.08.2003
Patent