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Year of Publication 19.11.2020
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METHOD FOR EXAMINING GAS BY MASS SPECTROMETRY AND MASS SPECTROMETER
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Year of Publication 19.11.2020
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공정의 실시간 모니터링 방법 및 질량 분광계
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Year of Publication 21.10.2019
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METHOD FOR MASS SPECTROMETRIC EXAMINATION OF GAS MIXTURES AND MASS SPECTROMETER THEREFOR
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Year of Publication 22.06.2015
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IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH
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Very sensitive real-time inline process mass spectrometer based on FFT Ion Trap technique
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Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH
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Year of Publication 29.08.2017
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Mass spectrometer comprising an ionization device
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Year of Publication 16.01.2024
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Method for mass spectrometric examination of gas mixtures and mass spectrometer therefor
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Year of Publication 26.01.2021
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MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
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Year of Publication 02.06.2022
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Year of Publication 02.06.2022
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MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
LAUE, Alexander, GORKHOVER, Leonid, CHUNG, Hin Yiu Anthony, REUTER, Rüdiger, FEDOSENKO, Gennady
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Year of Publication 09.02.2022
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METHOD FOR MASS SPECTROMETRIC EXAMINATION OF GAS MIXTURES AND MASS SPECTROMETER THEREFOR
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Year of Publication 23.10.2019
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Year of Publication 23.10.2019
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MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
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Year of Publication 08.10.2020
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Year of Publication 08.10.2020
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