KONTAKT IN EINER BOHRUNG IN EINEM HALBLEITER UND VERFAHREN ZU SEINER HERSTELLUNG
DIXIT, PANKAJ, SLIWA, JACK, SANDER, CRAIG S, FARNAAM, MOHAMMAD, KLEIN, RICHARD K
Year of Publication 15.09.1994
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Year of Publication 15.09.1994
Patent
Contact in a contact hole in a semiconductor and method of producing same
DIXIT, PANKAJ, SLIWA, JACK, SANDER, CRAIG S, FARNAAM, MOHAMMAD, KLEIN, RICHARD K
Year of Publication 24.08.1994
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Year of Publication 24.08.1994
Patent
CONTACT IN A CONTACT HOLE IN A SEMICONDUCTOR AND METHOD OF PRODUCING SAME
SANDERS, CRAIG S, DIXIT, PANKAJ, SLIWA, JACK, FARNAAM, MOHAMMAD, KLEIN, RICHARD K
Year of Publication 16.01.1991
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Year of Publication 16.01.1991
Patent
Contact plug and interconnect employing a barrier lining and a backfilled conductor material
DIXIT; PANKAJ, KLEIN; RICHARD K, SLIWA; JACK, FARNAAM; MOHAMMAD, SANDER; CRAIG S
Year of Publication 02.10.1990
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Year of Publication 02.10.1990
Patent
Contact plug and interconnect employing a barrier lining and a backfilled conductor material
DIXIT; PANKAJ, KLEIN; RICHARD K, SLIWA; JACK, FARNAAM; MOHAMMAD, SANDER; CRAIG S
Year of Publication 28.11.1989
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Year of Publication 28.11.1989
Patent