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"FAN; LONG-SHEN"
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MICRO-MINIATURE STRUCTURE AND METHOD FOR FABRICATION THEREOF
by
ZAPPE, HANS H
,
FAN
,
LONG
-
SHEN
Year of Publication
23.05.1997
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IC-processed electrostatic micromotors
by
Fan
,
Long
-
Shen
,
Tai, Yu-Chong
,
Muller, Richard S.
Published in
Sensors and actuators
(15.11.1989)
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Micro-miniature structures and method of fabrication thereof
by
HANS HELMUT ZAPPE
,
FAN LONG SHEN
Year of Publication
02.01.2002
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Micro-miniature structure fabrication
by
ZAPPE, HANS HELMUT
,
FAN
,
LONG
-
SHEN
Year of Publication
03.02.1999
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Micro-miniature structure fabrication
by
FAN LONG
-
SHEN
,
ZAPPE HANS HELMUT
Year of Publication
17.10.1997
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Micro-miniature structures and method of fabrication thereof
by
ZAPPE; HANS H
,
FAN
;
LONG
-
SHEN
Year of Publication
15.11.1994
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Micro-miniature structure fabrication
by
ZAPPE, HANS HELMUT
,
FAN
,
LONG
-
SHEN
Year of Publication
12.10.1994
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Micro-miniature structures and method of fabrication thereof
by
HANS HELMUT ZAPPE
,
LONG
-
SHEN FAN
Year of Publication
20.04.1994
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Micro-miniature structure fabrication
by
ZAPPE, HANS HELMUT
,
FAN
,
LONG
-
SHEN
Year of Publication
13.04.1994
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Verfahren zur Herstellung von Mikrominiatur-Bauteilen
by
ZAPPE, HANS HELMUT
,
FAN
,
LONG
-
SHEN
Year of Publication
30.09.1999
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