Low-Temperature Al2O3 Atomic Layer Deposition
Groner, M. D, Fabreguette, F. H, Elam, J. W, George, S. M
Published in Chemistry of materials (24.02.2004)
Published in Chemistry of materials (24.02.2004)
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Journal Article
Ultra-low thermal conductivity in W/Al2O3 nanolaminates
COSTESCU, R. M, CAHILL, D. G, FABREGUETTE, F. H, SECHRIST, Z. A, GEORGE, S. M
Published in Science (American Association for the Advancement of Science) (13.02.2004)
Published in Science (American Association for the Advancement of Science) (13.02.2004)
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Journal Article
Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6
FABREGUETTE, F. H, SECHRIST, Z. A, ELAM, J. W, GEORGE, S. M
Published in Thin solid films (22.09.2005)
Published in Thin solid films (22.09.2005)
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Journal Article
Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
GUILLOT, J, FABREGUETTE, F, IMHOFF, L, HEINTZ, O, DE LUCAS, M. C, SACILOTTI, M, DOMENICHINI, B, BOURGEOIS, S
Published in Applied surface science (15.06.2001)
Published in Applied surface science (15.06.2001)
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Conference Proceeding
Journal Article
X-ray multiple diffraction in the characterization of TiNO and TiO2 thin films grown on Si(001)
Chiaramonte, Th, Abramof, E., Fabreguette, F., Sacilotti, M., Cardoso, L.P.
Published in Applied surface science (30.11.2006)
Published in Applied surface science (30.11.2006)
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Journal Article
Cathodoluminescence and structural studies of nitrided 3D gallium structures grown by MOCVD
Chiaramonte, Th, Romero, Manuel J., Fabreguette, F., Cardoso, L.P., Sacilotti, M.
Published in Journal of luminescence (01.03.2009)
Published in Journal of luminescence (01.03.2009)
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Journal Article
Thermal effects on the growth by metal organic chemical vapour deposition of TiO2 thin films on (100) GaAs substrates
Brevet, A., Fabreguette, F., Imhoff, L., Marco de Lucas, M.C., Heintz, O., Saviot, L., Sacilotti, M., Bourgeois, S.
Published in Surface & coatings technology (01.03.2002)
Published in Surface & coatings technology (01.03.2002)
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Journal Article
Temperature and substrate influence on the structure of TiNxOy thin films grown by low pressure metal organic chemical vapour deposition
Fabreguette, F., Imhoff, L., Guillot, J., Domenichini, B., Marco de Lucas, M.C., Sibillot, P., Bourgeois, S., Sacilotti, M.
Published in Surface & coatings technology (01.03.2000)
Published in Surface & coatings technology (01.03.2000)
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Journal Article
Conference Proceeding
Structure and properties of GaNxOy films grown by nitridation of GaAs (1 0 0) substrates
DE LUCAS, M. C, FABREGUETTE, F, LINSAVANH, M, IMHOFF, L, HEINTZ, O, JOSSE-COURTY, C, MESNIER, M. T, POTIN, V, BOURGEOIS, S, SACILOTTI, M
Published in Journal of crystal growth (19.01.2004)
Published in Journal of crystal growth (19.01.2004)
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Conference Proceeding
Journal Article
Structural characterization of TiO2/TiN O (δ-doping) heterostructures on (1 1 0)TiO2 substrates
Chiaramonte, T, Cardoso, L.P, Gelamo, R.V, Fabreguette, F, Sacilotti, M, Marco de Lucas, M.C, Imhoff, L, Bourgeois, S, Kihn, Y, Casanove, M.-J
Published in Applied surface science (01.05.2003)
Published in Applied surface science (01.05.2003)
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Journal Article
Anisotropic and non-heterogeneous continuum percolation in titanium oxynitride thin columnar films
Fabreguette, F, Maglione, M, Clerc, J P, Bourgeois, S, Sacilotti, M
Published in Journal of physics. Condensed matter (02.09.2002)
Published in Journal of physics. Condensed matter (02.09.2002)
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Journal Article
Structural characterization of TiNxOy/TiO2 single crystalline and nanometric multilayers grown by LP-MOCVD on (110)TiO2
FABREGUETTE, F, GUILLOT, J, CARDOSO, L. P, MARCON, R, IMHOFF, L, DE LUCAS, M. C, SIBILLOT, P, BOURGEOIS, S, DUFOUR, P, SACILOTTI, M
Published in Thin solid films (03.12.2001)
Published in Thin solid films (03.12.2001)
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Conference Proceeding
Journal Article
Structural and in depth characterization of newly designed conducting/insulating TiNxOy/TiO2 multilayers obtained by one step LP-MOCVD growth
Fabreguette, F., Imhoff, L., Heintz, O., Maglione, M., Domenichini, B., Marco de Lucas, M.C., Sibillot, P., Bourgeois, S., Sacilotti, M.
Published in Applied surface science (15.05.2001)
Published in Applied surface science (15.05.2001)
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Journal Article
Correlation Between the Electrical Properties and the Morphology of Low-Pressure MOCVD Titanium Oxynitride Thin Films Grown at Various Temperatures
Fabreguette, F., Imhoff, L., Maglione, M., Domenichini, B., Marco de Lucas, M. C., Sibillot, P., Bourgeois, S., Sacilotti, M.
Published in Chemical vapor deposition (01.06.2000)
Published in Chemical vapor deposition (01.06.2000)
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Journal Article
MOCVD growth of TiO2 thin films on single crystal GaAs substrates
Marco de Lucas, M.C., Fabreguette, F., Collin, S., Bourgeois, S.
Published in The international journal of inorganic materials (01.06.2000)
Published in The international journal of inorganic materials (01.06.2000)
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Journal Article
Corrosion behaviour of TiN0.8O0.4 coating on 316L stainless steel alloy
Jouaiti, A, Boulghallat, M, Lâallam, L, Oulfajrite, H, Fabreguette, F, Guillot, J, Bourgeois, S, Steinbrunn, A
Published in Journal of chemical research (01.12.2003)
Published in Journal of chemical research (01.12.2003)
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Journal Article