Design of a poly silicon MEMS microphone for high signal-to-noise ratio
Dehe, Alfons, Wurzer, Martin, Fuldner, Marc, Krumbein, Ulrich
Published in 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2013)
Published in 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2013)
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Conference Proceeding
Dual-Workfunction Gate Engineering in a Corner Parasitics-Free Shallow-Trench-Isolation Complementary-Metal-Oxide-Semiconductor Technology
Schwalke, Udo, Füldner, Marc, Bothe, WalterZatsch, Janssen, DariuschHadawi, Schon, Peter
Published in Japanese Journal of Applied Physics (01.04.1999)
Published in Japanese Journal of Applied Physics (01.04.1999)
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Journal Article
A 130dB SPL 72dB SNR MEMS Microphone Using a Sealed-Dual Membrane Transducer and a Power-Scaling Read-Out ASIC
Sant, Luca, Fuldner, Marc, Bach, Elmar, Conzatti, Francesco, Caspani, Alessandro, Gaggl, Richard, Baschirotto, Andrea, Wiesbauer, Andreas
Published in IEEE sensors journal (15.04.2022)
Published in IEEE sensors journal (15.04.2022)
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Journal Article
MONOLITHIC SOUND TRANSDUCER AND ENVIRONMENTAL BARRIER
Streb, Fabian, Füldner, Marc, Anzinger, Sebastian, Wasisto, Hutomo Suryo, Maier, Dominic
Year of Publication 06.06.2024
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Year of Publication 06.06.2024
Patent
PRESSURE TRANSDUCER DEVICE WITH HYBRID BARRIER STRUCTURE AND METHOD FOR MANUFACTURING SAME
Wiesbauer, Andreas, Füldner, Marc, Anzinger, Sebastian, Wasisto, Hutomo Suryo, Maier, Dominic
Year of Publication 06.06.2024
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Year of Publication 06.06.2024
Patent
MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE
Streb, Fabian, Füldner, Marc, Anzinger, Sebastian, Wasisto, Hutomo Suryo, Maier, Dominic
Year of Publication 06.06.2024
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Year of Publication 06.06.2024
Patent
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
Streb, Fabian, Timme, Hans-Jörg, Füldner, Marc, Straßer, Johann, Wasisto, Hutomo Suryo, Walther, Arnaud
Year of Publication 29.02.2024
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Year of Publication 29.02.2024
Patent
MEMS Device
Barzen, Stefan, Kiriak, Maria, Timme, Hans-Jörg, Tkachuk, Konstantin, Füldner, Marc, Herrmann, Matthias Friedrich, Onaran, Abidin Güçlü, Walther, Arnaud, Geißler, Stefan
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
Patent
System and method for a transducer
Wiesbauer, Andreas, Krumbein, Ulrich, Füldner, Marc, Jenkner, Christian
Year of Publication 05.02.2019
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Year of Publication 05.02.2019
Patent
System and Method for a Transducer
Wiesbauer, Andreas, Krumbein, Ulrich, Füldner, Marc, Jenkner, Christian
Year of Publication 19.04.2018
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Year of Publication 19.04.2018
Patent