Impact of LKD5109 TM low-k to cap /liner interfaces in single damascene process and performance
Iacopi, F, Patz, M, Vos, I, Tokei, Z, Sijmus, B, Le, Q T, Sleeckx, E A U T H O R% A F F Eyckens, Struyf, H, Das, A, Maex, K
Published in Microelectronic engineering (01.11.2003)
Published in Microelectronic engineering (01.11.2003)
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