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"Exterkamp, Michael E"
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"Exterkamp, Michael E"
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BOTTOM ANTI-REFLECTIVE COATING USING RAPID THERMAL ANNEAL WITH OXIDIZING GAS
by
DOAN, JONATHAN
,
EXTERKAMP
,
MICHAEL
,
E
,
STEPHEN, ALAN, D
Year of Publication
31.03.2010
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Method of forming an alignment mark on a wafer, and a wafer comprising same
by
EXTERKAMP MICHAEL E
,
HAUSE FREDERICK N
,
HAINES JEFFREY C
Year of Publication
22.05.2007
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Method of forming an alignment mark on a wafer, and a wafer comprising same
by
Hause, Frederick N
,
Haines, Jeffrey C
,
Exterkamp
,
Michael E
Year of Publication
22.05.2007
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Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas
by
Stephen, Alan D
,
Exterkamp
,
Michael E
,
Doan, Jonathan
Year of Publication
21.09.2004
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Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas
by
EXTERKAMP MICHAEL E
,
DOAN JONATHAN
,
STEPHEN ALAN D
Year of Publication
21.09.2004
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BOTTOM ANTI-REFLECTIVE COATING USING RAPID THERMAL ANNEAL WITH OXIDIZING GAS
by
DOAN, JONATHAN
,
EXTERKAMP
,
MICHAEL
,
E
,
STEPHEN, ALAN, D
Year of Publication
02.04.2003
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Bottom anti-reflective coating using rapid thermal anneal with oxidizing gas
by
MICHAEL E
.
EXTERKAMP
,
ALAN D. STEPHEN
,
JONATHAN DOAN
Year of Publication
03.12.2001
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BOTTOM ANTI-REFLECTIVE COATING USING RAPID THERMAL ANNEAL WITH OXIDIZING GAS
by
DOAN, JONATHAN
,
EXTERKAMP
,
MICHAEL
,
E
,
STEPHEN, ALAN, D
Year of Publication
29.11.2001
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