Sub-10 nm pattern placement verification of quantum tomography freestanding gratings
Eurlings, M.F.A., van Beek, J.T.M., Verheijen, M.J., Weterings, J.P., Beijerinck, H.C.W.
Published in Microelectronic engineering (01.03.1998)
Published in Microelectronic engineering (01.03.1998)
Get full text
Journal Article
Conference Proceeding