A Microdischarge-Based Monolithic Pressure Sensor
Eun, Christine Kay, Xin Luo, Jun-Chieh Wang, Zhongmin Xiong, Kushner, Mark, Gianchandani, Yogesh
Published in Journal of microelectromechanical systems (01.12.2014)
Published in Journal of microelectromechanical systems (01.12.2014)
Get full text
Journal Article