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Year of Publication 08.02.2018
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Characterization of boron carbon nitride films with a low dielectric constant
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Published in Diamond and related materials (01.03.2002)
Published in Diamond and related materials (01.03.2002)
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Synthesis of boron nitride film with low dielectric constant for its application to silicon ultralarge scale integrated semiconductors
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Published in Diamond and related materials (01.03.2001)
Published in Diamond and related materials (01.03.2001)
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METHOD FOR CUTTING SILICON INGOT, METHOD FOR MANUFACTURING SILICON WAFER, AND SILICON WAFER
ETOU YOSHIHIRO, MATAGAWA SATOSHI, NAKASHIMA AKIRA, TAJIRI TOMOAKI, HASHIMOTO DAISUKE
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Year of Publication 03.05.2019
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Method for cutting silicon ingot, method for manufacturing silicon wafer and silicon wafer
TAJIRI, TOMOAKI, NAKASHIMA, AKIRA, ETOU, YOSHIHIRO, MATAGAWA, SATOSHI, HASHIMOTO, DAISUKE
Year of Publication 01.04.2018
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Year of Publication 01.04.2018
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