Excimer laser etching process of CdTe crystals for formation of deep vertical trenches
YASUDA, K, NIRAULA, M, NAKAMURA, K, YOKOTA, M, SHINGU, I, NODA, K, AGATA, Y, ABE, K, ERYU, O
Published in Journal of electronic materials (01.08.2007)
Published in Journal of electronic materials (01.08.2007)
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Conference Proceeding
Journal Article
Optical emission characteristics of ablation plasma plumes during the laser-etching process of CdTe
ABE, K, ERYU, O, NAKASHIMA, S, TERAI, M, KUBO, M, NIRAULA, M, YASUDA, K
Published in Journal of electronic materials (01.11.2005)
Published in Journal of electronic materials (01.11.2005)
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Journal Article
Kinetics of solid phase regrowth of self-ion-implanted amorphous SiC during low temperature furnace annealing
Eryu, O., Abe, K., Nakashima, K., Harima, H.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2003)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2003)
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Journal Article
High precision chemical mechanical polishing of highly-boron-doped Si wafer used for epitaxial substrate
Watanabe, J., Yu, G., Eryu, O., Koshiyama, I., Izumi, K., Nakashima, K., Umeno, M., Jimbo, T., Kodama, K.
Published in Precision engineering (01.04.2005)
Published in Precision engineering (01.04.2005)
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Journal Article
Correlation between Er-luminescent centers and defects in Si co-implanted with Er and O
Nakashima, K, Eryu, O, Akiyama, H, Maeda, Y, Ebisu, H
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2001)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2001)
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Journal Article
n-Type doping characteristics of O-implanted AlGaN
NAKANO, Yoshitaka, FUJISHIMA, Osamu, KACHI, Tetsu, ABE, Koji, ERYU, Osamu, NAKASHIMA, Kenshiro, JIMBO, Takashi
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
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Journal Article
Nd–Fe–B Thin Films with Perpendicular Magnetic Anisotropy and High Coercivity Prepared by Pulsed Laser Annealing
Okuda, Takashi, Sugimura, Akinori, Eryu, Osamu, Serrona, Leo Karl E. B., Adachi, Nobuyasu, Sakamoto, Isao, Nakanishi, Akio
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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Journal Article
Correlation between O/Er Content Ratio and Photoluminescence Intensity of (Er, O)-Doped Hydrogenated Amorphous Si Thin Films Prepared by a Catalytic Chemical Vapor Deposition/Laser Ablation Hybrid Process
Sakai, Joe, Masuda, Atsushi, Akiyama, Haruo, Eryu, Osamu, Nakashima, Kenshiro, Matsumura, Hideki
Published in Japanese Journal of Applied Physics (01.07.2004)
Published in Japanese Journal of Applied Physics (01.07.2004)
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Journal Article
Positron annihilation study of vacancy-type defects in silicon carbide co-implanted with aluminum and carbon ions
Ohshima, Takeshi, Uedono, Akira, Abe, Hiroshi, Chen, Z.Q., Itoh, Hisayoshi, Yoshikawa, Masahito, Abe, Koji, Eryu, Osamu, Nakashima, Kenshiro
Published in Physica. B, Condensed matter (01.12.2001)
Published in Physica. B, Condensed matter (01.12.2001)
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Journal Article
Boundary conditions for formation of Er–O optical centers in Er- and O-coimplanted Si
Nakashima, Kenshiro, Eryu, Osamu, Saito, Akikazu, Nakata, Toshitake, Watanabe, Masanori
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
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Journal Article
Novel deposition technique of Er-doped a-Si:H combining catalytic chemical vapor deposition and pulsed laser-ablation
Masuda, Atsushi, Sakai, Joe, Akiyama, Haruo, Eryu, Osamu, Nakashima, Kenshiro, Matsumura, Hideki
Published in Journal of non-crystalline solids (01.05.2000)
Published in Journal of non-crystalline solids (01.05.2000)
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Journal Article
Formation of an ohmic electrode in SiC using a pulsed laser irradiation method
Eryu, Osamu, Kume, Takayuki, Nakashima, Kenshiro, Nakata, Toshitake, Inoue, Morio
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1997)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1997)
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Journal Article
Optical centers and oxygen in Er-ion implanted silicon
Nakashima, Kenshiro, Eryu, Osamu, Iioka, Osamu, Nakata, Toshitake, Watanabe, Masanori
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1997)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1997)
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Journal Article