Hot target magnetron sputtering for ferromagnetic films deposition
Sidelev, Dmitrii V., Bleykher, Galina A., Grudinin, Vladislav A., Krivobokov, Valery P., Bestetti, Massimiliano, Syrtanov, Maxim S., Erofeev, Evgenii V.
Published in Surface & coatings technology (25.01.2018)
Published in Surface & coatings technology (25.01.2018)
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Journal Article
The oxygen-deficient TiO2 films deposited by a dual magnetron sputtering
Sidelev, Dmitrii V., Yurjev, Yury N., Krivobokov, Valeriy P., Erofeev, Evgenii V., Penkova, Olga V., Novikov, Vadim A.
Published in Vacuum (01.12.2016)
Published in Vacuum (01.12.2016)
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Journal Article