Search Results - "Erk, Henry F." :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Elimination of Carbon Contamination from Silicon Kerf Using a Furnace Aerosol Reactor Methodology

Elimination of Carbon Contamination from Silicon Kerf Using a Furnace Aerosol Reactor Methodology

by Vazquez-Pufleau, Miguel, Chadha, Tandeep S, Yablonsky, Gregory, Erk, Henry F, Biswas, Pratim
Published in Industrial & engineering chemistry research (10.06.2015)

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Journal Article

Wet Etching Technology for Semiconductor and Solar Silicon Manufacturing: Part 2 - Process, Equipment and Implementation

Wet Etching Technology for Semiconductor and Solar Silicon Manufacturing: Part 2 - Process, Equipment and Implementation

by Erk, Henry F.
Published in ECS transactions (01.01.2010)

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Journal Article

METHODS FOR ETCHING THE EDGE OF A SILICON WAFER

METHODS FOR ETCHING THE EDGE OF A SILICON WAFER

by DOANE THOMAS E, SCHMIDT JUDY A, ERK HENRY F, HOLLANDER EUGENE R, ALBRECHT PETER D, VANDAMME ROLAND R, ZHANG GUOQIANG (DAVID)
Year of Publication 25.01.2011

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Patent

Wet Etching Technology for Semiconductor and Solar Silicon Manufacturing: Part 1 - Fundamentals

Wet Etching Technology for Semiconductor and Solar Silicon Manufacturing: Part 1 - Fundamentals

by Erk, Henry F.
Published in ECS transactions (01.01.2010)

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Journal Article

PROCESS AND APPARATUS FOR ETCHING SEMICONDUCTOR WAFERS

PROCESS AND APPARATUS FOR ETCHING SEMICONDUCTOR WAFERS

by VANDAMME, ROLAND R, ERK, HENRY F
Year of Publication 01.02.1999

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Patent

Challenges in Wafering Processes for Semiconductor and Solar Wafers

Challenges in Wafering Processes for Semiconductor and Solar Wafers

by Erk, Henry
Published in ECS transactions (06.03.2009)

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Journal Article

Acid-based etching of silicon wafers : Mass-transfer and kinetic effects

Acid-based etching of silicon wafers : Mass-transfer and kinetic effects

by KULKARNI, M. S, ERK, H. F
Published in Journal of the Electrochemical Society (2000)

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Journal Article

Self-inhibited rate in gas-solid noncatalytic reactions: the "rotten apple" phenomenon and multiple reaction pathways

Self-inhibited rate in gas-solid noncatalytic reactions: the "rotten apple" phenomenon and multiple reaction pathways

by Erk, Henry F, Dudukovic, M. P
Published in Industrial & engineering chemistry fundamentals (01.02.1983)

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Journal Article

Fluidized bed reactor systems and distributors for use in same

Fluidized bed reactor systems and distributors for use in same

by ERK HENRY F
Year of Publication 09.09.2014

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Patent

Systems for producing silane

Systems for producing silane

by Gupta Puneet, Erk Henry F, Grabbe Alexis
Year of Publication 08.11.2016

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Patent

Self-inhibited rate in gas-solid noncatalytic reactions. The shrinking core model

Self-inhibited rate in gas-solid noncatalytic reactions. The shrinking core model

by Erk, Henry F, Dudukovic, Milorad P
Published in Industrial & engineering chemistry fundamentals (01.02.1984)

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Journal Article

METHODS FOR REDUCING THE DEPOSITION OF SILICON ON REACTOR WALLS USING PERIPHERAL SILICON TETRACHLORIDE

METHODS FOR REDUCING THE DEPOSITION OF SILICON ON REACTOR WALLS USING PERIPHERAL SILICON TETRACHLORIDE

by ERK HENRY F
Year of Publication 30.06.2011

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Patent

FLUIDIZED BED REACTOR SYSTEMS AND DISTRIBUTORS FOR USE IN SAME

FLUIDIZED BED REACTOR SYSTEMS AND DISTRIBUTORS FOR USE IN SAME

by ERK HENRY F
Year of Publication 30.06.2011

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Patent

Systems For Processing Abrasive Slurry

Systems For Processing Abrasive Slurry

by ERK HENRY F, TANNA VANDAN
Year of Publication 16.05.2013

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Patent

Methods For Processing Abrasive Slurry

Methods For Processing Abrasive Slurry

by ERK HENRY F, TANNA VANDAN
Year of Publication 16.05.2013

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Patent

SYSTEMS FOR PRODUCING SILANE

SYSTEMS FOR PRODUCING SILANE

by GUPTA PUNEET, ERK HENRY F, GRABBE ALEXIS
Year of Publication 04.06.2015

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Patent

Systems for producing silane

Systems for producing silane

by GUPTA PUNEET, ERK HENRY F, GRABBE ALEXIS
Year of Publication 21.04.2015

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Patent

Methods for producing silane

Methods for producing silane

by GUPTA PUNEET, ERK HENRY F, GRABBE ALEXIS
Year of Publication 10.03.2015

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Patent

METHODS FOR PRODUCING SILANE

METHODS FOR PRODUCING SILANE

by GUPTA PUNEET, ERK HENRY F, GRABBE ALEXIS
Year of Publication 06.11.2014

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Patent

Methods for producing silane

Methods for producing silane

by GUPTA PUNEET, ERK HENRY F, GRABBE ALEXIS
Year of Publication 02.09.2014

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Patent

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