Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath
Lee, Moo-Young, Seo, Jong-In, Eo, Hyundong, Kim, Tae-Woo, Jung, Jiwon, Lim, Yeong-Min, Chung, Chin-Wook
Published in Plasma sources science & technology (01.06.2021)
Published in Plasma sources science & technology (01.06.2021)
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