Effect of substrate tilt on sputter-deposited AuTa films
Engwall, A.M., Bayu Aji, L.B., Baker, A.A., Shin, S.J., Bae, J.H., McCall, S.K., Moody, J.D., Kucheyev, S.O.
Published in Applied surface science (01.05.2021)
Published in Applied surface science (01.05.2021)
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Journal Article
Enhanced properties of tungsten films by high-power impulse magnetron sputtering
Engwall, A.M., Shin, S.J., Bae, J., Wang, Y.M.
Published in Surface & coatings technology (15.04.2019)
Published in Surface & coatings technology (15.04.2019)
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Journal Article
Effects of growth rate and dynamic substrate tilt on properties of Au-Ta alloy films deposited by high-power impulse magnetron sputtering
Kim, E., Engwall, A.M., Merlo, J.B., Shin, S.J., Goodelman, D.C., Baker, A.A., Taylor, G.V., Kucheyev, S.O., Bayu Aji, L.B.
Published in Surface & coatings technology (15.10.2024)
Published in Surface & coatings technology (15.10.2024)
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Journal Article
Sputter deposition of high electrical resistivity Au-Ta alloy coatings on rotating substrates
Engwall, A.M., Bayu Aji, L.B., Shin, S.J., Baker, A.A., Bae, J.H., McCall, S.K., Moody, J.D., Kucheyev, S.O.
Published in Thin solid films (30.09.2022)
Published in Thin solid films (30.09.2022)
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Journal Article
Stress evolution during growth of 1-D island arrays: Kinetics and length scaling
Chason, E., Engwall, A.M., Miller, C.M., Chen, C.-H., Bhandari, A., Soni, S.K., Hearne, S.J., Freund, L.B., Sheldon, B.W.
Published in Scripta materialia (01.03.2015)
Published in Scripta materialia (01.03.2015)
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Journal Article