Critical Dimension Issues for 200 mm Electron Projection Masks
Resnick, Douglas J., Nordquist, Kevin, Dauksher, William J., Ainley, Eric, Lu, Bing, Mangat, Pawitter, Weisbrod, Eric, Martin, Carl, Chang, J., Englestad, Roxann, Lovell, Ed, Ivin, Vladimir
Published in Japanese Journal of Applied Physics (2000)
Published in Japanese Journal of Applied Physics (2000)
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