Critical dimension issues for 200 mm electron projection masks
Resnick, D.J., Nordquist, K., Dauksher, W.J., Ainley, E., Lu, B., Mangat, P., Weisbrod, E., Martin, C., Wei, A., Englestad, R., Lovell, E., Ivin, V.
Published in Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) (2000)
Published in Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) (2000)
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Conference Proceeding
Critical Dimension Issues for 200 mm Electron Projection Masks
Resnick, Douglas J., Nordquist, Kevin, Dauksher, William J., Ainley, Eric, Lu, Bing, Mangat, Pawitter, Weisbrod, Eric, Martin, Carl, Chang, J., Englestad, Roxann, Lovell, Ed, Ivin, Vladimir
Published in Japanese Journal of Applied Physics (2000)
Published in Japanese Journal of Applied Physics (2000)
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Journal Article
LIBRA-LiTE, a light ion inertial confinement fusion reactor with ballistic ion propagation
Peterson, R.R., Englestad, R.L., Kulcinski, G.L., Lovell, E.G., MacFarlane, J.J., Mogahed, E., Moses, G.A., Rutledge, S., Sawan, M.E., Sviatoslavsky, I.N., Sviatoslavsky, G., Wittenberg, L.J.
Published in [Proceedings] The 14th IEEE/NPSS Symposium Fusion Engineering (1991)
Published in [Proceedings] The 14th IEEE/NPSS Symposium Fusion Engineering (1991)
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Conference Proceeding