Tetrahedral Amorphous Carbon Films By Filtered Cathodic Vacuum-Arc Deposition For Air-Bearing-Surface Overcoat
Inaba, Hiroshi, Furusawa, Kenji, Hirano, Shinya, Sasaki, Shinji, Todoroki, Satoru, Yamasaka, Minoru, Endou, Masayoshi
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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