Thermal relaxation phenomena in the formation of device-quality SiO2/Si interfaces
LUCOVSKY, G, BJORKMAN, C. H, YASUDA, T, EMMERICHS, U, MEYER, C, LEO, K, KURZ, H
Published in Japanese journal of applied physics (01.12.1993)
Published in Japanese journal of applied physics (01.12.1993)
Get full text
Conference Proceeding
Diffusion of cobalt and titanium in SiO2
Baten, J., Offenberg, M., Emmerichs, U., Balk, P., Grunthaner, P.J., Ewert, S.
Published in Applied surface science (01.10.1989)
Published in Applied surface science (01.10.1989)
Get full text
Journal Article
Integration of wet-chemical processing with low temperature plasma-assisted processes for the formation of device-quality Si/SiO2 interfaces in Si(111) surfaces
YASUDA, T, BJORKMAN, C. H, MA, Y, LU, Z, LUCOVSKY, G, EMMERICHS, U, MEYER, C, LEO, K, KURZ, H
Published in Microelectronic engineering (01.08.1994)
Published in Microelectronic engineering (01.08.1994)
Get full text
Conference Proceeding
Journal Article
Integrated processing of stacked-gate heterostructures: plasma-assisted low temperature processing combined with rapid thermal high-temperature processing
Misra, V., Hattangady, S., Xu, X-L, Watkins, M.J., Hornung, B., Lucovsky, G., Wortman, J.J., Emmerichs, U., Meyer, C., Leo, K., Kurz, H.
Published in Microelectronic engineering (01.08.1994)
Published in Microelectronic engineering (01.08.1994)
Get full text
Journal Article
Conference Proceeding
Influence of Si-O bonding arrangements at kinks on second-harmonic generation from vicinal Si(111) surfaces
Lüpke, G, Meyer, C, Emmerichs, U, Wolter, F, Kurz, H
Published in Physical review. B, Condensed matter (15.12.1994)
Published in Physical review. B, Condensed matter (15.12.1994)
Get more information
Journal Article
Second-harmonic response of chemically modified vicinal Si(111) surfaces
Emmerichs, U, Meyer, C, Bakker, HJ, Kurz, H, Bjorkman, CH, Shearon, Jr, CE, Ma, Y, Yasuda, T, Jing, Z, Lucovsky, G, Whitten, JL
Published in Physical review. B, Condensed matter (15.08.1994)
Published in Physical review. B, Condensed matter (15.08.1994)
Get more information
Journal Article
Thermally induced stress relaxation of silicon dioxide on vicinal Si(111) studied with surface nonlinear-optical techniques
Lupke, G., Wolter, F., Emmerichs, U., Meyer, C., Kurz, H., Yasuda, T., Lucovsky, G., Bjorkman, C.H.
Published in Proceedings of 1994 Nonlinear Optics: Materials, Fundamentals and Applications (1994)
Published in Proceedings of 1994 Nonlinear Optics: Materials, Fundamentals and Applications (1994)
Get full text
Conference Proceeding
Generation of incoherent mid-infrared photon echoes with parametrically downconverted light
Woutersen, S, Bonn, M, Brugmans, M J, Emmerichs, U, Bakker, H J
Published in Optics letters (01.10.1996)
Published in Optics letters (01.10.1996)
Get more information
Journal Article
Integration of wet-chemical processing with low-temperature plasma-assisted processes for the formation of device-quality Si/SiO 2 interfaces on Si(111) surfaces
Yasuda, T., Bjorkman, C.H., Ma, Y., Lu, Z., Lucovsky, G., Emmerichs, U., Meyer, C., Leo, K., Kurz, H.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
Get full text
Journal Article
Thermal Relaxation Phenomena in the Formation of Device-Quality SiO 2 /Si Interfaces
Lucovsky, G., Bjorkman, C. H., Yasuda, T., Emmerichs, U., Meyer, C., Leo, K., Kurz, H.
Published in Japanese Journal of Applied Physics (01.12.1993)
Published in Japanese Journal of Applied Physics (01.12.1993)
Get full text
Journal Article
Diffusion of cobalt and titanium in SiO 2
Baten, J., Offenberg, M., Emmerichs, U., Balk, P., Grunthaner, P.J., Ewert, S.
Published in Applied surface science (1989)
Published in Applied surface science (1989)
Get full text
Journal Article
Electronic transitions at Si
Lupke, G., Meyer, C., Emmerichs, U., Wolter, E., Kurz, H., Bjorkman, C., Lucovsky, G.
Published in Technical Digest. CLEO/Pacific Rim'95. The Pacific Rim Conference on Lasers and Electro-Optics (1995)
Published in Technical Digest. CLEO/Pacific Rim'95. The Pacific Rim Conference on Lasers and Electro-Optics (1995)
Get full text
Conference Proceeding