Why is it that differently doped regions in semiconductors are visible in low voltage SEM?
El-Gomati, M.M., Wells, T.C.R., Mullerova, I., Frank, L., Jayakody, H.
Published in IEEE transactions on electron devices (01.02.2004)
Published in IEEE transactions on electron devices (01.02.2004)
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Journal Article
An Experimental and Monte Carlo Study of Secondary Electron Emission from Elemental Solids
Walker, CGH, El-Gomati, MM, Assa'd, AMD, Zadražil, M
Published in Microscopy and microanalysis (01.08.2008)
Published in Microscopy and microanalysis (01.08.2008)
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Journal Article
Secondary, Backscattered and Low Energy Loss electrons in the SEM: Quantification for nano analysis
El-Gomati, MM, Walker, CGH, Bonet, C, Tear, SP, Matthew, JAD
Published in Microscopy and microanalysis (01.08.2008)
Published in Microscopy and microanalysis (01.08.2008)
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Journal Article
Imaging of doped Si in low and very low voltage SEM: the contrast interpretation
Jayakody, G.H., Wells, T.R.C., El-Gomati, M.M.
Published in Journal of electron spectroscopy and related phenomena (01.05.2005)
Published in Journal of electron spectroscopy and related phenomena (01.05.2005)
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Journal Article
Field emission studies of tungsten-coated silicon-based field emitters
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Journal Article
Conference Proceeding
Electron Backscattering from Real and In-Situ Treated Surfaces
Frank, Luděk, Steklý, Richard, Zadražil, Martin, El-Gomati, Mohamed M., Müllerová, Ilona
Published in Mikrochimica acta (1966) (01.01.2000)
Published in Mikrochimica acta (1966) (01.01.2000)
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Journal Article
Monte Carlo simulations of nanometric structures: analysis of micromachined field emitters
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Journal Article
Conference Proceeding
Mc3D: A three-dimensional Monte Carlo system simulating image contrast in surface analytical scanning electron microscopy I-Object-oriented software design and tests
Yan, H., Gomati, M. M. El, Chu, D. P., Dowsett, M. G., Prutton, M., Wilkinson, D. K.
Published in Scanning (01.09.1998)
Published in Scanning (01.09.1998)
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Journal Article
Photoresist silylation and dry development for sub-micron photolithography
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Journal Article
Conference Proceeding
Scanning low energy electron loss microscopy (SLEELM) : metals on semiconductors
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Journal Article
Conference Proceeding