AFM testing of the nanomechanical behaviour of MEMS micromembranes
Ekwinski, G., Goehlich, A., Trieu, K., Rymuza, Z., Koszewski, A.
Published in International journal of materials research (01.08.2008)
Published in International journal of materials research (01.08.2008)
Get full text
Journal Article
Evaluation of quality of mechanical components of MEMS pressure sensors
Ekwinski, G., Trieu, K., Rymuza, Z.
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
Get full text
Conference Proceeding