New approach to estimate nanowear test results through nanoindentation test
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Conference Proceeding
Deposition of silicon oxide film from tetraethoxysilane using a pulsed dielectric barrier discharge
Ulejczyk, B., Karpiński, L., Scholz, M., Ekwińska, M. A., Rymuza, Z., Opalińska, T., Żukowska, E. A., Schmidt-Szałowski, K.
Published in Czechoslovak journal of physics (01.01.2006)
Published in Czechoslovak journal of physics (01.01.2006)
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Journal Article
Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example
Bieniek, T., Janczyk, G., Ekwinska, M., Budzynski, T., Gluszko, G., Grabiec, P., Kociubinski, A.
Published in 2014 International 3D Systems Integration Conference (3DIC) (01.12.2014)
Published in 2014 International 3D Systems Integration Conference (3DIC) (01.12.2014)
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Conference Proceeding
Customer-oriented product engineering of micro and nano devices
Bieniek, T, Janczyk, G, Grabiec, P, Szynka, J, Kalicinski, S, Janus, P, Domański, K, Sierakowski, A, Ekwińska, M, Szmigiel, D, Tomaszewski, D, Hölzer, G, Schröpfer, G
Published in Proceedings of the 17th International Conference Mixed Design of Integrated Circuits and Systems - MIXDES 2010 (01.06.2010)
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Published in Proceedings of the 17th International Conference Mixed Design of Integrated Circuits and Systems - MIXDES 2010 (01.06.2010)
Conference Proceeding
Evaluation of ultrathin films of polymeric resists for nanoimprint lithography
Rymuza, Z., Koszewski, A., Ekwinska, M., Nowek, A.
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
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Conference Proceeding