Bend the curve – Shape optimization in laser grayscale direct write lithography using a single figure of merit
Erjawetz, Jan, Collé, Dominique, Ekindorf, Gerda, Heyl, Peter, Ritter, Daniel, Reddy, Aditya, Schift, Helmut
Published in Micro and Nano Engineering (01.06.2022)
Published in Micro and Nano Engineering (01.06.2022)
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