Electrical and spectroscopic comparison of HfO2/Si interfaces on nitrided and un-nitrided Si(100)
Kirsch, P. D., Kang, C. S., Lozano, J., Lee, J. C., Ekerdt, J. G.
Published in Journal of applied physics (01.04.2002)
Published in Journal of applied physics (01.04.2002)
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Journal Article
Template fabrication schemes for step and flash imprint lithography
Bailey, T.C., Resnick, D.J., Mancini, D., Nordquist, K.J., Dauksher, W.J., Ainley, E., Talin, A., Gehoski, K., Baker, J.H., Choi, B.J., Johnson, S., Colburn, M., Meissl, M., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Conference Proceeding
Nucleation and growth study of atomic layer deposited HfO2 gate dielectrics resulting in improved scaling and electron mobility
Kirsch, P. D., Quevedo-Lopez, M. A., Li, H. -J., Senzaki, Y., Peterson, J. J., Song, S. C., Krishnan, S. A., Moumen, N., Barnett, J., Bersuker, G., Hung, P. Y., Lee, B. H., Lafford, T., Wang, Q., Gay, D., Ekerdt, J. G.
Published in Journal of applied physics (15.01.2006)
Published in Journal of applied physics (15.01.2006)
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Journal Article
Oxidation resistance of thin boron carbo-nitride films on Ge(100) and Ge nanowires
Fitzpatrick, P.R., Wang, T., Heitsch, A.T., Korgel, B.A., Ekerdt, J.G.
Published in Thin solid films (01.05.2009)
Published in Thin solid films (01.05.2009)
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Journal Article
Low temperature chemical vapor deposition of tungsten carbide for copper diffusion barriers
Sun, Y.-M, Lee, S.Y, Lemonds, A.M, Engbrecht, E.R, Veldman, S, Lozano, J, White, J.M, Ekerdt, J.G, Emesh, I, Pfeifer, K
Published in Thin solid films (01.10.2001)
Published in Thin solid films (01.10.2001)
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Journal Article
Growth and characterization of epitaxial anatase TiO2(001) on SrTiO3-buffered Si(001) using atomic layer deposition
McDaniel, M.D., Posadas, A., Wang, T., Demkov, A.A., Ekerdt, J.G.
Published in Thin solid films (31.08.2012)
Published in Thin solid films (31.08.2012)
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Journal Article
Iridium film growth with iridium tris-acetylacetonate : oxygen and substrate effects
SUN, Y.-M, ENDLE, J. P, SMITH, K, WHALEY, S, MAHAFFY, R, EKERDT, J. G, WHITE, J. M, HANCE, R. L
Published in Thin solid films (01.06.1999)
Published in Thin solid films (01.06.1999)
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Journal Article
Role of Surface Chemistry in Semiconductor Thin Film Processing
Ekerdt, J. G, Sun, Y.-M, Szabo, A, Szulczewski, G. J, White, J. M
Published in Chemical reviews (20.06.1996)
Published in Chemical reviews (20.06.1996)
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Journal Article
Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films
Endle, J.P, Sun, Y.-M, Nguyen, N, Madhukar, S, Hance, R.L, White, J.M, Ekerdt, J.G
Published in Thin solid films (01.06.2001)
Published in Thin solid films (01.06.2001)
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Journal Article
Fabrication of multi-tiered structures on step and flash imprint lithography templates
Johnson, S., Resnick, D.J., Mancini, D., Nordquist, K., Dauksher, W.J., Gehoski, K., Baker, J.H., Dues, L., Hooper, A., Bailey, T.C., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.06.2003)
Published in Microelectronic engineering (01.06.2003)
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Journal Article
Conference Proceeding
Atomic layer deposition of TaSix thin films on SiO2 using TaF5 and Si2H6
Lemonds, A M, Bolom, T, Ahearn, W J, Gay, D C, White, J M, Ekerdt, J G
Published in Thin solid films (22.09.2005)
Published in Thin solid films (22.09.2005)
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Journal Article
Ultra thin tungsten nitride film growth on dielectric surfaces
Sun, Y.-M., Engbrecht, E.R., Bolom, T., Cilino, C., Sim, J.H., White, J.M., Ekerdt, J.G., Pfeifer, K.
Published in Thin solid films (30.06.2004)
Published in Thin solid films (30.06.2004)
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Journal Article
Optical second harmonic spectra of silicon-adatom surfaces : theory and experiment
GAVRILENKO, V. I, WU, R. Q, DOWNER, M. C, EKERDT, J. G, LIM, D, PARKINSON, P
Published in Thin solid films (27.03.2000)
Published in Thin solid films (27.03.2000)
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Conference Proceeding
Journal Article
Improved step and flash imprint lithography templates for nanofabrication
Resnick, D.J., Mancini, D., Dauksher, W.J., Nordquist, K., Bailey, T.C., Johnson, S., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.09.2003)
Published in Microelectronic engineering (01.09.2003)
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