Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
Endo, Taishi, Egashira, Yoshiya, Furukawa, Hiroyuki, Hashiguchi, Hiroyuki, Kosaka, Kouji, Watanabe, Masayuki, Miyata, Noboru, Moriyama, Shirou, Sasaki, Syunichi, Nakada, Akira, Ohmi, Tadahiro, Kubota, Hiroshi
Published in Japanese Journal of Applied Physics (01.07.2005)
Published in Japanese Journal of Applied Physics (01.07.2005)
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Journal Article
Highly Reliable Piezoelectric Actuator for Precision Stage System
Hashiguchi, Hiroyuki, Egashira, Yoshiya, Furukawa, Hiroyuki, Endo, Taishi, Kosaka, Tetsuya, Kosaka, Koji, Uozumi, Kiyohiko, Watanabe, Masayuki, Yamakawa, Takahiro, Miyata, Noboru, Nakada, Akira, Kubota, Hiroshi, Ohmi, Tadahiro
Published in Japanese Journal of Applied Physics (01.05.2005)
Published in Japanese Journal of Applied Physics (01.05.2005)
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Journal Article
Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
Egashira, Yoshiya, Kosaka, Kouji, Iwabuchi, Tetsuya, Kosaka, Tetsuya, Baba, Tetsuro, Endo, Taishi, Hashiguchi, Hiroyuki, Harada, Takashi, Nagamoto, Keiichi, Watanabe, Masayuki, Yamakawa, Takahiro, Miyata, Noboru, Moriyama, Shiro, Morizono, Yasuhiro, Nakada, Akira, Kubota, Hiroshi, Ohmi, Tadahiro
Published in Japanese Journal of Applied Physics (2002)
Published in Japanese Journal of Applied Physics (2002)
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Journal Article
Wear Reduction Method for Frictionally Fast Feeding Piezoactuator
Kosaka, Kouji, Iwabuchi, Tetsuya, Baba, Tetsuro, Endo, Taishi, Hashiguchi, Hiroyuki, Furukawa, Hiroyuki, Egashira, Yoshiya, Hashimoto, Seiji, Touge, Mutsumi, Uozumi, Kiyohiko, Nakada, Akira, Kubota, Hiroshi, Ohmi, Tadahiro
Published in Japanese Journal of Applied Physics (01.02.2006)
Published in Japanese Journal of Applied Physics (01.02.2006)
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Journal Article
Development of an ultra-precision stage control system using nonresonant ultrasonic motor
Hashimoto, S., Ohishi, K., Ohishi, T., Ishikawa, T., Kosaka, K., Egashira, Y., Kubota, H., Ohmi, T.
Published in IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) (2003)
Published in IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) (2003)
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Conference Proceeding
DRIVING METHOD OF FEEDING MECHANISM
EGASHIRA YOSHIYA, KUBOTA HIROSHI, NAKADA AKIRA, KOSAKA KOJI, ENDO YASUSHI
Year of Publication 13.10.2005
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Year of Publication 13.10.2005
Patent
Ultra-precision stage control based on friction model of non-resonant ultrasonic motor
Hashimoto, S., Ohishi, K., Ohishi, T., Ishikawa, T., Kosaka, K., Egashira, Y., Kubota, H., Ohmi, T.
Published in The 8th IEEE International Workshop on Advanced Motion Control, 2004. AMC '04 (2004)
Published in The 8th IEEE International Workshop on Advanced Motion Control, 2004. AMC '04 (2004)
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Conference Proceeding
0.69 nm resolution ultrasonic motor for large stroke precision stage
Egashira, Y., Kosaka, K., Takada, S., Iwabuchi, T., Baba, T., Moriyama, S., Harada, T., Nagamoto, K., Nakada, A., Kubota, H., Ohmi, T.
Published in Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) (2001)
Published in Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) (2001)
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Conference Proceeding
Development of nonresonant ultrasonic motor with sub-nanometer resolution
Egashira, Y., Kosaka, K., Endo, T., Hashiguchi, H., Nagamoto, K., Watanabe, M., Yamakawa, T., Nakada, A., Kubota, H., Ohmi, T.
Published in 2002 IEEE Ultrasonics Symposium, 2002. Proceedings (2002)
Published in 2002 IEEE Ultrasonics Symposium, 2002. Proceedings (2002)
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Conference Proceeding