Creating a Monocrystalline Membrane via Etching and Sealing of Nanoholes Considering its Sealing Behavior
Fiedler, H.L., Ebschke, S., Poloczek, R.R., Kallis, Klaus T.
Published in Journal of nano research (01.10.2013)
Published in Journal of nano research (01.10.2013)
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Journal Article
Planar technology integration of monocrystalline Silicon-membranes using nanoholes
Ebschke, S., Poloczek, R. R., Kallis, K. T., Fiedler, H. L.
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01.08.2013)
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01.08.2013)
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Conference Proceeding
Journal Article
Test environment for characterization of a nanoscale sensor system consisting of fluid flow sensors based on the Thermal-Time-of-Flight (TToF) principle and absolute pressure sensors
Ebschke, S., Zimmermann, J., Wiggershaus, A., Kallis, K. T., Fiedler, H. L.
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
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Conference Proceeding
A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications
Ebschke, S., Poloczek, R. R., Kallis, K. T., Fiedler, H. L.
Published in 2013 IEEE SENSORS (01.11.2013)
Published in 2013 IEEE SENSORS (01.11.2013)
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Conference Proceeding
Charging effects on SOI based NEMS by the example of a nanoscale Thermal-Time-of-Flight (TToF) sensor
Ebschke, S., Wieker, M., Gerwinn, J., Loechte, A., Kallis, K. T., Fiedler, H. L.
Published in 14th IEEE International Conference on Nanotechnology (01.08.2014)
Published in 14th IEEE International Conference on Nanotechnology (01.08.2014)
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Conference Proceeding