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Year of Publication 12.01.2016
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Year of Publication 28.12.2015
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Dynamic erosion and deposition on carbon and tungsten due to simultaneous bombardment with deuterium and beryllium ions in plasmas
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Conference Proceeding
Ion implantation apparatus and control method for ion implantation apparatus
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Year of Publication 30.05.2017
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ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION APPARATUS
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Year of Publication 30.12.2015
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ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION APPARATUS
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Year of Publication 17.12.2015
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TWI654668B
OKADA, KEIJI, FUJII, YOSHITO, EBISU, SHINJI, HIROKAWA, SUGURU, KUDO, TETSUYA
Year of Publication 21.03.2019
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Year of Publication 21.03.2019
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Ion implantation apparatus and control method for ion implantation apparatus
OKADA, KEIJI, FUJII, YOSHITO, EBISU, SHINJI, HIROKAWA, SUGURU, KUDO, TETSUYA
Year of Publication 01.01.2016
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Year of Publication 01.01.2016
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