Equilibrium shape of Si
Eaglesham, DJ, White, AE, Feldman, LC, Moriya, N, Jacobson, DC
Published in Physical review letters (15.03.1993)
Published in Physical review letters (15.03.1993)
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Journal Article
Behavior of molybdenum in silicon evaluated for integrated circuit processing
BENTON, J. L, JACOBSON, D. C, JACKSON, B, JOHNSON, J. A, BOONE, T, EAGLESHAM, D. J, STEVIE, F. A, BECERRO, J
Published in Journal of the Electrochemical Society (01.05.1999)
Published in Journal of the Electrochemical Society (01.05.1999)
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Journal Article
Island formation in Ge/Si epitaxy
Eaglesham, D.J., Hull, R.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.03.1995)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.03.1995)
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Journal Article
Conference Proceeding
Implantation and transient boron diffusion: the role of the silicon self-interstitial
Stolk, P.A., Gossmann, H.-J., Eaglesham, D.J., Poate, J.M.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
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Journal Article
Formation, evolution and annihilation of interstitial clusters in ion implanted Si
Libertino, Sebania, Coffa, Salvatore, Benton, Janet L, Halliburton, Kim, Eaglesham, David J
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1999)
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Journal Article
Light nitrogen implant for preparing thin-gate oxides
Liu, C.T., Ma, Y., Becerro, J., Nakahara, S., Eaglesham, D.J., Hillenius, S.J.
Published in IEEE electron device letters (01.03.1997)
Published in IEEE electron device letters (01.03.1997)
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Journal Article
Critical issues in ion implantation of silicon below 5 keV: Defects and diffusion
Agarwal, Aditya, Gossmann, H.-J, Eaglesham, D.J, Pelaz, L, Jacobson, D.C, Poate, J.M, Haynes, T.E
Published in Materials science & engineering. A, Structural materials : properties, microstructure and processing (30.09.1998)
Published in Materials science & engineering. A, Structural materials : properties, microstructure and processing (30.09.1998)
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Conference Proceeding
The effect of carbon on diffusion in silicon
Stolk, P.A., Gossmann, H.-J., Eaglesham, D.J., Poate, J.M.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.01.1996)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.01.1996)
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Conference Proceeding