Search Results - "EURLINGS, MARKUS FRANCISCUS ANTONIUS" :: K.UTB vyhledávací portál

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오버레이 및 임계 치수 센서들에서의 퓨필 조명을 위한 디바이스 및 방법

by SHMAREV YEVGENIY KONSTANTINOVICH, EURLINGS MARKUS FRANCISCUS ANTONIUS
Year of Publication 11.03.2019

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RADIATION SOURCE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, KLEEMANS NIEK ANTONIUS JACOBUS MARIA, PHAM TIEN NANG, NOORDMAN OSCAR FRANCISCUS JOZEPHUS, WANG JIUN CHENG, VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS, VAN SCHOOT JAN BERNARD PLECHELMUS, HOFSTRA RAMON MARK, ZHANG KEVIN WEIMIN
Year of Publication 28.09.2016

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METHOD FOR FABRICATING DEVICE, MASK SET USED IN THE SAME, DATA SET FOR CONTROLLING PROGRAMMABLE PATTERNING DEVICE, METHOD FOR GENERATING MASK PATTERN AND COMPUTER PROGRAM TO DRAW ISOLATED FEATURE WITH INCREASED DEPTH OF FOCUS

by EURLINGS MARKUS FRANCISCUS ANTONIUS, FINDERS JOZEF MARIA
Year of Publication 15.10.2004

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APPARATUS METHOD AND COMPUTER PROGRAM PRODUCT FOR PERFORMING A MODEL BASED OPTICAL PROXIMITY CORRECTION FACTORING NEIGHBOR INFLUENCE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, LAIDIG THOMAS, HOLLERBACH UWE
Year of Publication 09.11.2006

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METHOD OF DETERMINING PARAMETERS FOR LITHOGRAPHY, COMPUTER SYSTEM AND COMPUTER PROGRAM THEREFOR, AND METHOD OF MANUFACTURING DEVICE AND DEVICE MANUFACTURED THEREBY

by EURLINGS MARKUS FRANCISCUS ANTONIUS, KOOLEN ARMAND EUGENE ALBERT
Year of Publication 17.06.2004

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MASK FOR LITHOGRAPHY, PREPARATION METHOD OF MASK, LITHOGRAPHY APPARATUS AND PREPARATION METHOD OF DEVICE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, DIERICHS MARCEL MATHIJS THEODORE MARIE, VANDIJSSELDONK ANTONIUS JOHANNES JOSEPHUS
Year of Publication 07.01.2004

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METHOD OF REMOVING ASSIST FEATURES UTILIZED TO IMPROVE PROCESS LATITUDE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, CHEN JANG FUNG, HSU DUAN FU STEPHEN
Year of Publication 02.06.2003

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APPARATUS GENERATING A HORIZONTAL AND VERTICAL MASK LAYOUT CONCERNING BIPOLAR LIGHT, AND A METHOD THEREFOR

by EURLINGS MARKUS FRANCISCUS ANTONIUS, CHEN JANG FUNG, WAMPLER KURT E, CORCORAN NOEL, HSU DUAN FU STEPHEN
Year of Publication 28.05.2004

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METHOD OF OPERATING A LITHOGRAPHIC APPARATUS LITHOGRAPHIC APPARATUS METHOD OF MANUFACTURING A DEVICE AND DEVICE MANUFACTURED THEREBY

by EURLINGS MARKUS FRANCISCUS ANTONIUS, DIERICHS MARCEL, VAN DER LAAN HANS, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
Year of Publication 08.03.2002

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LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

by EURLINGS MARKUS FRANCISCUS ANTONIUS, VAN DER VEEN PAUL, KRIKKE JAN JAAP, HOEGEE JAN
Year of Publication 16.01.2002

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LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHOD DEVICE MANUFACTURED THEREBY CONTROL SYSTEM COMPUTER PROGRAM AND COMPUTER PROGRAM PRODUCT

by EURLINGS MARKUS FRANCISCUS ANTONIUS, DIERICHS MARCEL, MULDER HEINE MELLE, VANSCHOOT JAN BERNARD PLECHELMUS, VANDIJSSELDONK ANTONIUS JOHANNES JOSEPHUS
Year of Publication 11.12.2002

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SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY APPARATUS

by EURLINGS, Markus Franciscus Antonius, VAN GREEVENBROEK, Hendrikus, Robertus, Marie
Year of Publication 22.11.2023

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Method and device for pupil illumination in overlay and critical dimension sensors

by Eurlings, Markus Franciscus Antonius, Shmarev, Yevgeniy Konstantinovich
Year of Publication 25.08.2020

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Method and Device for Pupil Illumination in Overlay and Critical Dimension Sensors

by EURLINGS, Markus Franciscus Antonius, SHMAREV, Yevgeniy Konstantinovich
Year of Publication 23.05.2019

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METHOD AND DEVICE FOR PUPIL ILLUMINATION IN OVERLAY AND CRITICAL DIMENSION SENSORS

by MARKUS FRANCISCUS ANTONIUS EURLINGS, YEVGENIY KONSTANTINOVICH SHMAREV
Year of Publication 09.01.2018

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METHOD AND DEVICE FOR PUPIL ILLUMINATION IN OVERLAY AND CRITICAL DIMENSION SENSORS

by EURLINGS, Markus, Franciscus, Antonius, SHMAREV, Yevgeniy, Konstantinovich
Year of Publication 04.01.2018

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Lithographic apparatus and device manufacturing method

by Mulder, Heine Melle, Eurlings, Markus Franciscus Antonius
Year of Publication 27.09.2017

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Method of measuring a parameter of a patterning process, metrology apparatus, target

by Koolen, Armand Eugene Albert, Eurlings, Markus Franciscus Antonius, Schreel, Koenraad Remi André Maria, Sokolov, Sergei, Cheng, Su-Ting, Tarabrin, Sergey
Year of Publication 19.10.2021

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METHOD OF MEASURING A PARAMETER OF A PATTERNING PROCESS, METROLOGY APPARATUS, TARGET

by SCHREEL, Koenraad Remi Andre Maria, CHENG, Su-Ting, EURLINGS, Markus Franciscus Antonius, KOOLEN, Armand Eugene Albert, TARABRIN, Sergey, SOKOLOV, Sergei
Year of Publication 18.06.2020

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Beam delivery for EUV lithography

by Van Schoot, Jan Bernard Plechelmus, Eurlings, Markus Franciscus Antonius, Kreuwel, Hermanus Johannes Maria
Year of Publication 14.05.2019

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