Search Results - "EURLINGS, MARKUS" :: K.UTB vyhledávací portál

Loading…

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

by EURLINGS MARKUS, NOORDMAN OSCAR
Year of Publication 02.05.2016

Get full text

Patent

Loading…

오버레이 및 임계 치수 센서들에서의 퓨필 조명을 위한 디바이스 및 방법

by SHMAREV YEVGENIY KONSTANTINOVICH, EURLINGS MARKUS FRANCISCUS ANTONIUS
Year of Publication 11.03.2019

Get full text

Patent

Loading…

LITHOGRAPHIC APPARATUS AND METHOD FOR REDUCING STRAY RADIATION

by VERWEIJ ANTONIE, EURLINGS MARKUS, DIERICHS MARCEL, VAN GREEVENBROEK HENDRIKUS
Year of Publication 29.03.2012

Get full text

Patent

Loading…

RADIATION SOURCE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, KLEEMANS NIEK ANTONIUS JACOBUS MARIA, PHAM TIEN NANG, NOORDMAN OSCAR FRANCISCUS JOZEPHUS, WANG JIUN CHENG, VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS, VAN SCHOOT JAN BERNARD PLECHELMUS, HOFSTRA RAMON MARK, ZHANG KEVIN WEIMIN
Year of Publication 28.09.2016

Get full text

Patent

Loading…

SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY APPARATUS

by EURLINGS, Markus Franciscus Antonius, VAN GREEVENBROEK, Hendrikus, Robertus, Marie
Year of Publication 22.11.2023

Get full text

Patent

Loading…

AN ILLUMINATOR FOR A LITHOGRAPHY APPARATUS A LITHOGRAPHY APPARATUS COMPRISING SUCH AN ILLUMINAOR AND A MANUFACTURING METHOD EMPLOYING SUCH A LITHOGRAPHY APPARATUS

by EURLINGS MARKUS, KRIKKE JAN JAAP
Year of Publication 07.07.2001

Get full text

Patent

Loading…

METHOD FOR FABRICATING DEVICE, MASK SET USED IN THE SAME, DATA SET FOR CONTROLLING PROGRAMMABLE PATTERNING DEVICE, METHOD FOR GENERATING MASK PATTERN AND COMPUTER PROGRAM TO DRAW ISOLATED FEATURE WITH INCREASED DEPTH OF FOCUS

by EURLINGS MARKUS FRANCISCUS ANTONIUS, FINDERS JOZEF MARIA
Year of Publication 15.10.2004

Get full text

Patent

Loading…

LITHOGRAPHY TOOL HAVING VACUUM RETICLE LIBRARY COUPLED TO VACUUM CHAMBER

by PUERTO SANTIAGO DEL, EURLINGS MARKUS F. A
Year of Publication 27.03.2004

Get full text

Patent

Loading…

APPARATUS METHOD AND COMPUTER PROGRAM PRODUCT FOR PERFORMING A MODEL BASED OPTICAL PROXIMITY CORRECTION FACTORING NEIGHBOR INFLUENCE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, LAIDIG THOMAS, HOLLERBACH UWE
Year of Publication 09.11.2006

Get full text

Patent

Loading…

APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION

by BASELMANS, Johannes, VAN GREEVENBROEK, Hendrikus, ZHOU, Zili, VAN VOORST, Peter, ARABUL, Mustafa, BRULS, Dominique, EURLINGS, Markus
Year of Publication 25.04.2024

Get full text

Patent

Loading…

Method and device for pupil illumination in overlay and critical dimension sensors

by Eurlings, Markus Franciscus Antonius, Shmarev, Yevgeniy Konstantinovich
Year of Publication 25.08.2020

Get full text

Patent

Loading…

SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY APPARATUS

by BASELMANS, Johannes, VAN GREEVENBROEK, Hendrikus, ZHOU, Zili, VAN VOORST, Peter, EURLINGS, Markus
Year of Publication 02.11.2023

Get full text

Patent

Loading…

METHOD OF DETERMINING PARAMETERS FOR LITHOGRAPHY, COMPUTER SYSTEM AND COMPUTER PROGRAM THEREFOR, AND METHOD OF MANUFACTURING DEVICE AND DEVICE MANUFACTURED THEREBY

by EURLINGS MARKUS FRANCISCUS ANTONIUS, KOOLEN ARMAND EUGENE ALBERT
Year of Publication 17.06.2004

Get full text

Patent

Loading…

Method and Device for Pupil Illumination in Overlay and Critical Dimension Sensors

by EURLINGS, Markus Franciscus Antonius, SHMAREV, Yevgeniy Konstantinovich
Year of Publication 23.05.2019

Get full text

Patent

Loading…

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

by NOORDMAN, OSCAR, EURLINGS, MARKUS
Year of Publication 05.03.2015

Get full text

Patent

Loading…

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

by EURLINGS MARKUS, NOORDMAN OSCAR
Year of Publication 02.03.2015

Get full text

Patent

Loading…

METHOD AND DEVICE FOR PUPIL ILLUMINATION IN OVERLAY AND CRITICAL DIMENSION SENSORS

by EURLINGS, Markus, Franciscus, Antonius, SHMAREV, Yevgeniy, Konstantinovich
Year of Publication 04.01.2018

Get full text

Patent

Loading…

Lithographic apparatus and device manufacturing method

by Mulder, Heine Melle, Eurlings, Markus Franciscus Antonius
Year of Publication 27.09.2017

Get full text

Patent

Loading…

MASK FOR LITHOGRAPHY, PREPARATION METHOD OF MASK, LITHOGRAPHY APPARATUS AND PREPARATION METHOD OF DEVICE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, DIERICHS MARCEL MATHIJS THEODORE MARIE, VANDIJSSELDONK ANTONIUS JOHANNES JOSEPHUS
Year of Publication 07.01.2004

Get full text

Patent

Loading…

METHOD OF REMOVING ASSIST FEATURES UTILIZED TO IMPROVE PROCESS LATITUDE

by EURLINGS MARKUS FRANCISCUS ANTONIUS, CHEN JANG FUNG, HSU DUAN FU STEPHEN
Year of Publication 02.06.2003

Get full text

Patent

Refine Results

Format

Subject Area

Topic

Language

Year of Publication

Database