Anisotropic Etching of Submicronic Resist Structures by Resonant Inductive Plasma Etching
Etrillard, Jackie, Francou, Jean-Marc, Inard, Alain, Henry, Daniel
Published in Japanese Journal of Applied Physics (01.10.1994)
Published in Japanese Journal of Applied Physics (01.10.1994)
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Journal Article
WDM-FDM approach for a multiservice home network
Guillory, J., Chikha, K., Pizzinat, A., Guignard, P., Charbonnier, B., Etrillard, J., Algani, C.
Published in 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC) (01.03.2013)
Published in 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC) (01.03.2013)
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Conference Proceeding