ELECTRON BEAM GENERATOR, ELECTRON BEAM EXPOSURE EQUIPMENT, AND MANUFACTURING METHOD
MIYAGUCHI YUTAKA, KOJIMA AKIRA, KOSHIDA NOBUYOSHI, ESASHI MASAKI, IKEGAMI NAOKATSU, SUDA RYUTARO
Year of Publication 13.09.2018
Get full text
Year of Publication 13.09.2018
Patent
SENSOR DEVICE
FUJIYOSHI MOTOHIRO, HATA YOSHIYUKI, ESASHI MASAKI, TANAKA SHUJI, NONOMURA YUTAKA, BITO KOJI, MUROYAMA MASANORI, NAKAYAMA TAKAHIRO
Year of Publication 29.06.2017
Get full text
Year of Publication 29.06.2017
Patent
LAMB WAVE-BASED SENSING DEVICE
KANO KAZUHIKO, TANAKA SHUJI, ESASHI MASAKI, TESHIGAWARA AKIHIKO, HASHIMOTO KIYONARI
Year of Publication 11.05.2015
Get full text
Year of Publication 11.05.2015
Patent
INTEGRATED CIRCUIT DEVICE INCLUDING PIEZOELECTRIC MEMS SWITCH AND MANUFACTURING METHOD OF THE SAME
ANDO MASATO, TANAKA SHUJI, ESASHI MASAKI, IMAMURA TETSUJI, SHINKAWA SHOHEI
Year of Publication 07.05.2015
Get full text
Year of Publication 07.05.2015
Patent
ATOMIC LAYER DEPOSITION DEVICE
TAKEZAWA TORU, ESASHI MASAKI, TANAKA SHUJI, KUMANO KATSUFUMI, HONMA KOJI
Year of Publication 20.04.2015
Get full text
Year of Publication 20.04.2015
Patent
SURFACE ACOUSTIC WAVE ELEMENT AND PHYSICAL QUANTITY SENSOR USING THE SAME
YAMAMOTO YASUO, ESASHI MASAKI, TANAKA SHUJI, TESHIGAWARA AKIHIKO, ABHEY SARANSWARUP KOCHHAR
Year of Publication 17.11.2016
Get full text
Year of Publication 17.11.2016
Patent
SURFACE ACOUSTIC WAVE SENSOR
TAKAHATA TOSHIHIKO, IWAKI TAKAO, TANAKA SHUJI, ESASHI MASAKI, TESHIGAWARA AKIHIKO, HASHIMOTO KENYA
Year of Publication 21.12.2015
Get full text
Year of Publication 21.12.2015
Patent
High Rate Deposition of Silicon Dioxide Membrane by Excimer Laser Enhanced Projection Chemical Vapor Deposition from Organic Compounds at Low Temperature
TOMOURA, S, TAKASHIMA, K, MINAMI, K, ESASHI, M, NISHIZAWA, J.-I
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.06.1993)
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.06.1993)
Get full text
Conference Proceeding
Journal Article
SENSOR DEVICE AND MANUFACTURING METHOD THEREOF
HATA YOSHIYUKI, TANAKA SHUJI, ESASHI MASAKI, NONOMURA YUTAKA, YAMAGUCHI TAKATADA, YAMADA HITOSHI, FUNAHASHI HIROFUMI, MUROYAMA MASANORI, NAKAYAMA TAKAHIRO
Year of Publication 07.05.2015
Get full text
Year of Publication 07.05.2015
Patent