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Year of Publication 14.03.2023
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Year of Publication 28.02.2024
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Year of Publication 23.03.2023
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Year of Publication 23.03.2023
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타겟 재료 전달 시스템의 수명을 연장시키기 위한 장치 및 방법
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Year of Publication 01.07.2021
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EUV 광원 내에서 파편을 제어하기 위한 장치 및 방법
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Year of Publication 17.01.2020
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Year of Publication 17.01.2020
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액적 생성기 성능을 모니터링 및 제어하는 장치 및 방법
ERSHOV ALEXANDER IGOREVICH, DRIESSEN THEODORUS WILHELMUS, ROLLINGER BOB, TREES DIETMAR UWE HERBERT, VASCHENKO GEORGIY OLEGOVICH, WINKELS KOEN GERHARDUS
Year of Publication 03.12.2020
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Year of Publication 03.12.2020
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FACETED EUV OPTICAL ELEMENT
ERSHOV ALEXANDER IGOREVICH, FOMENKOV IGOR VLADIMIROVICH, BRANDT DAVID CRAIG
Year of Publication 22.08.2017
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Year of Publication 22.08.2017
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EUV 리소그래피 시스템 내에서의 광학 요소 수명 연장
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Year of Publication 05.11.2020
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Year of Publication 05.11.2020
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안내 장치 및 관련 시스템
ERSHOV ALEXANDER IGOREVICH, MOJAB SEYEDMOHAMMAD, NADIR KERIM, STEWART JOHN TOM, XIA CHUNGUANG, LABETSKI DZMITRY, DUARTE RODRIGES NUNES RUI MIGUEL, FEENSTRA KORNELIS FRITS, JOHNKADAKSHAM ARUN, KRAUSHAAR MATTHIAS, MA YUE, TEGENBOSCH HENRICUS GERARDUS, BERENDSEN CHRISTIANUS WILHELMUS JOHANNES, HUMMLER KLAUS MARTIN, FOMENKOV IGOR VLADIMIROVICH, LOGINOV MAKSIM, LANGLOIS MARC GUY, SHATALOV ALEXANDER, LAFORGE ANDREW DAVID
Year of Publication 04.09.2019
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Year of Publication 04.09.2019
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ROBUST FLUID COUPLING APPARATUS
Kincal, Serkan, Sams, Benjamin Andrew, Driessen, Theodorus Wilhelmus, Ershov, Alexander Igorevich, Trees, Dietmar Uwe Herbert, Telkar, Vikas Giridhar
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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NOZZLE APPARATUS
Amada, Yoshiho, Rollinger, Bob, Vaschenko, Georgiy Olegovich, Lukens, Joshua Mark, Ershov, Alexander Igorevich
Year of Publication 15.09.2022
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Year of Publication 15.09.2022
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